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Volumn 61, Issue 11-12, 2007, Pages 2277-2280
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Oxidation bonding of porous silicon nitride ceramics with high strength and low dielectric constant
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Author keywords
Dielectric constant; Porous ceramics; Si3N4; Strength
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Indexed keywords
CRYSTALLIZATION;
OXIDATION;
PERMITTIVITY;
POROSITY;
POROUS SILICON;
SILICA;
SILICON NITRIDE;
SINTERING;
OXIDATION BONDING PROCESSES;
POROUS CERAMICS;
CERAMIC MATERIALS;
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EID: 34147164398
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2006.08.067 Document Type: Article |
Times cited : (131)
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References (18)
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