Microfabrication by hot embossing and injection molding in LIGA process

2002 International Microprocesses and Nanotechnology Conference, MNC 2002

Volumn , Issue , 2002, Pages 192-193

  Mekaru, H ^a   Yamada, T ^a   En, Sho ^a   Hattori, T ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; MICROMACHINING; MOLDING; NANOTECHNOLOGY; OSCILLATORS (ELECTRONIC); SYNCHROTRON RADIATION;

BIOLOGICAL TECHNOLOGY; GALVANOFORMUNG; HOT-EMBOSSING; LARGE ASPECT RATIO; LIGA PROCESS; MASS PRODUCTION; REPRODUCTION TECHNIQUES; THREE-DIMENSIONAL (3D) MICROSTRUCTURES;

INJECTION MOLDING;

EID: 34047240551     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMNC.2002.1178609     Document Type: Conference Paper

References (0)