Characterization of CMOS compatible waveguide-coupled leaky-mode photodetectors

IEEE Photonics Technology Letters

Volumn 18, Issue 15, 2006, Pages 1657-1659

  Yuan, Guangwei ^a   Pownall, Robert ^a   Nikkel, Phil ^b   Thangaraj, Charles ^a   Chen, Thomas W ^a   Lear, Kevin L ^a  

^a Department of Chemical and Biological Engineering and School of Biomedical Engineering   (United States)

^b BROADCOM CORPORATION   (United States)

Author keywords

Near field scanning optical microscopy (NSOM); Silicon integrated photonics; Waveguide coupled leaky mode photodetector

Indexed keywords

CMOS COMPATIBLE; COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES; EFFECTIVE ABSORPTION; EFFECTIVE INDEX; INTEGRATED PHOTODETECTOR; INTEGRATED PHOTONICS; METAL-SEMICONDUCTOR-METAL PHOTODIODES; NEAR-FIELD SCANNING OPTICAL MICROSCOPY (NSOM); ON-CHIP OPTICAL INTERCONNECTS; RESPONSIVITY;

ABSORPTION; MOS DEVICES; OPTICAL DATA STORAGE; OPTICAL INSTRUMENTS; OPTICAL INTERCONNECTS; OPTOELECTRONIC DEVICES; PHOTODETECTORS; POLYSILICON; SCANNING; SEMICONDUCTOR DEVICE MANUFACTURE; WAVEGUIDES;

NEAR FIELD SCANNING OPTICAL MICROSCOPY;

EID: 34047238010     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2006.879527     Document Type: Article

References (8)

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