SCOPUS 정보 검색 플랫폼

Volumn 135, Issue 2, 2007, Pages 355-359

Characteristics of tantalum nitride thin film strain gauges for harsh environments

Author keywords

GF; Harsh environments; Strain gauge; Ta N thin film; TCR

Indexed keywords

ELECTROOXIDATION; FLOW OF GASES; RAPID THERMAL ANNEALING; STRAIN GAGES; SUBSTRATES; TANTALUM COMPOUNDS;

ANNEALING CONDITIONS; HARSH ENVIRONMENTS; OPTIMIZED DEPOSITION; TANTALUM NITRIDE;

THIN FILMS;

EID: 34047226524 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/j.sna.2006.07.025 Document Type: Article

Times cited : (36)

References (12)

1
- 2442656681
- Sputtered silicon thin film for piezoresistive pressure microsensors
- Obieta I., and Gracia F.J. Sputtered silicon thin film for piezoresistive pressure microsensors. Sens. Actuators A 41 (1994) 521-688
- (1994) Sens. Actuators A , vol.41 , pp. 521-688
- Obieta, I.¹ Gracia, F.J.²

2
- 0029232364
- Characterization of tantalum oxynitride thin films as high-temperature strain gauges
- Ayerdi I., Castano E., Alonso A.G., and Gracia F.J. Characterization of tantalum oxynitride thin films as high-temperature strain gauges. Sens. Actuators A 46/47 (1995) 218-221
- (1995) Sens. Actuators A , vol.46-47 , pp. 218-221
- Ayerdi, I.¹ Castano, E.² Alonso, A.G.³ Gracia, F.J.⁴

3
- 0027558467
- Pressure transducer with Au-Ni thin-film strain gauges
- Rajanna K., Mohan S., Nayak M.M., Gunasekaran N., and Muthunayagam A.E. Pressure transducer with Au-Ni thin-film strain gauges. IEEE Trans. Electron. Dev. 40 (1993) 521-524
- (1993) IEEE Trans. Electron. Dev. , vol.40 , pp. 521-524
- Rajanna, K.¹ Mohan, S.² Nayak, M.M.³ Gunasekaran, N.⁴ Muthunayagam, A.E.⁵

4
- 0025434383
- Thin-film pressure transducer with manganese film as the strain gauge
- Rajanna K., and Mohan S. Thin-film pressure transducer with manganese film as the strain gauge. Sens. Actuators A 24 (1990) 35-39
- (1990) Sens. Actuators A , vol.24 , pp. 35-39
- Rajanna, K.¹ Mohan, S.²

5
- 0027541965
- Ion-beam sputtered thin-film strain gauge pressure transducers
- Hongye W., Kun L., Zhichou A., Xu W., and Xun H. Ion-beam sputtered thin-film strain gauge pressure transducers. Sens. Actuators A 35 (1993) 265-268
- (1993) Sens. Actuators A , vol.35 , pp. 265-268
- Hongye, W.¹ Kun, L.² Zhichou, A.³ Xu, W.⁴ Xun, H.⁵

6
- 0022683699
- Behaviour of Bi-Sb alloy thin-film as strain gauges
- Sampath S., and Ramanaiah K.V. Behaviour of Bi-Sb alloy thin-film as strain gauges. Thin-Solid Films 137 (1986) 199-205
- (1986) Thin-Solid Films , vol.137 , pp. 199-205
- Sampath, S.¹ Ramanaiah, K.V.²

8
- 0026188346
- Piezoresistive pressure sensors based on poly-crystalline silicon
- Mosser V., Suski J., and Goss J. Piezoresistive pressure sensors based on poly-crystalline silicon. Sens. Actuators A 28 (1991) 113-132
- (1991) Sens. Actuators A , vol.28 , pp. 113-132
- Mosser, V.¹ Suski, J.² Goss, J.³

9
- 0027589685
- x)N films prepared by reactive sputtering
- x)N films prepared by reactive sputtering. Thin-Solid Film 240 (1991) 238-241
- (1991) Thin-Solid Film , vol.240 , pp. 238-241
- Tanaka, Y.¹ Ikeda, T.² Kelly, M.³

10
- 50749132337
- Ceramic pressure sensor based on tantalum thin-Film
- Ayerdi I., Castano E., Gracia A., and Gracia F.J. Ceramic pressure sensor based on tantalum thin-Film. Sens. Actuators A 41/42 (1994) 435-438
- (1994) Sens. Actuators A , vol.41-42 , pp. 435-438
- Ayerdi, I.¹ Castano, E.² Gracia, A.³ Gracia, F.J.⁴

11
- 0008022935
- Methuen and Co., London p. 73
- Worshnop B.L., and Flint H.T. Advanced Practical Physics for Students. 9th ed. (1951), Methuen and Co., London p. 73
- (1951) Advanced Practical Physics for Students. 9th ed.
- Worshnop, B.L.¹ Flint, H.T.²

12
- 84916392591
- Window A.L., and Holister G.S. (Eds), Elsevier Applied Science, London, UK
- Pople J. In: Window A.L., and Holister G.S. (Eds). Strain Gauge Technology (1989), Elsevier Applied Science, London, UK 256
- (1989) Strain Gauge Technology , pp. 256
- Pople, J.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.