Passivation layer on polyimide deposited by combined plasma immersion ion implantation and deposition and cathodic vacuum arc technique

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 3, 2007, Pages 411-414

  Han, Z J ^a   Tay, B K ^a   Sze, J Y ^a   Ha, P C T ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSPACE ENGINEERING; DEIONIZED WATER; ION BOMBARDMENT; ION IMPLANTATION; PASSIVATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

ATOMIC OXYGEN; CATHODIC VACUUM ARC; CONTACT ANGLE MEASUREMENTS;

POLYIMIDES;

EID: 34047188639     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2712196     Document Type: Article

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