Machining of aluminium nitride with ultra-violet and near-infrared Nd:YAG lasers

Journal of Materials Processing Technology

Volumn 189, Issue 1-3, 2007, Pages 409-417

  Gilbert, Tod ^a   Krstic, Vladimir D ^a   Zak, Gene ^a  

^a QUEEN S UNIVERSITY   (Canada)

Author keywords

Aluminium nitride; Ceramics; Laser machining; Micromachining; Near infrared laser; Ultra violet laser

Indexed keywords

ALUMINUM COMPOUNDS; CERAMIC MATERIALS; MICROMACHINING; PARAMETER ESTIMATION; PULSE TIME MODULATION; SURFACE ROUGHNESS;

ALUMINUM NITRIDE; LASER MACHINING; MATERIAL REMOVAL RATE (MRR); NEAR-INFRARED LASERS; PULSE FREQUENCY;

LASER BEAMS;

EID: 34047113424     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2007.02.025     Document Type: Article

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