3D integrated sensors in silicon-on-sapphire CMOS

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn , Issue , 2006, Pages 4959-4962

  Culurciello, Eugenio ^a   Andreou, Andreas G ^b  

^a Yale University   (United States)

^b Johns Hopkins University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE COUPLING; MULTI-CHIP SENSOR; SENSOR MODULE;

ACTUATORS; CMOS INTEGRATED CIRCUITS; ENERGY GAP; SILICON ON INSULATOR TECHNOLOGY; THREE DIMENSIONAL; VLSI CIRCUITS;

SENSORS;

EID: 34047106919     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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