Tomography experiment of an integrated circuit specimen using 3 MeV electrons in the transmission electron microscope

Review of Scientific Instruments

Volumn 78, Issue 1, 2007, Pages

  Zhang, Hai Bo ^b   Zhang, Xiang Liang ^b   Wang, Yong ^b   Takaoka, Akio ^a  

^a OSAKA UNIVERSITY   (Japan)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC IMPEDANCE TOMOGRAPHY; ELECTRON MICROSCOPES; ELECTRON SCATTERING; ELECTRONS; IMAGE RECONSTRUCTION; TRANSMISSION ELECTRON MICROSCOPY;

HIGH ENERGY ELECTRON TOMOGRAPHY; SERIAL PROJECTION; ULTRAHIGH VOLTAGE ELECTRON MICROSCOPES (HVEM);

DIGITAL INTEGRATED CIRCUITS;

ARTICLE; IMAGE PROCESSING; TOMOGRAPHY; TRANSMISSION ELECTRON MICROSCOPY;

IMAGE PROCESSING, COMPUTER-ASSISTED; MICROSCOPY, ELECTRON, TRANSMISSION; TOMOGRAPHY;

EID: 34047095754     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2409864     Document Type: Article

References (31)

1. Y. Mitsui, F. Yano, H. Kakibayashi, H. Shichi, and T. Aoyama, Microelectron. Reliab. 41, 1171 (2001).
2. H. Zhang, Micron 33, 515 (2002).
3. D. P. Vallett, IEEE Trans. Nanotechnol. 1, 117 (2002).
4. W. Hoppe, J. Gassmann, N. Hunsmann, H. J. Schramm, and M. Sturm, Hoppe Seyler's Z. Physiol. Chem. 355, 1483 (1974).
5. A. J. Koster, U. Ziese, A. J. Verkleij, A. H. Janssen, and K. P. de Jong, J. Phys. Chem. B 104, 9368 (2000).
6. M. Koguchi, H. Kakibayashi, R. Tsuneta, M. Yamaoka, T. Niino, N. Tanaka, K. Kase, and M. Iwaki, J. Electron Microsc. 50, 235 (2001).
7. P. A. Midgley and M. Weyland, Ultramicroscopy 96, 413 (2003).
8. J. M. Thomas, P. A. Midgley, T. J. V. Yates, J. S. Barnard, R. Raja, I. Arslan, and M. Weyland, Angew. Chem., Int. Ed. 43, 6745 (2004).
9. E. Bugiel, I. Daberkow, M. Schatz, and H. R. Tietz, in Proceedings of the 15th International Congress on Electron Microscopy (Microscopy Society of Southern Africa, Durban, 2002), Vol. 3, pp. 373-374.
10. C. Kübel, D. Hubert, W. F. Voorhout, and M. T. Otten, Microsc. Microanal. 8, 1104 (2002).
11. H. Stegmann, H.-J. Engelmann, and E. Zschech, Microelectron. Eng. 65, 171 (2003).
12. K. van Benthem, Appl. Phys. Lett. 87, 034104 (2005).
13. J. Frank, B. F. McEwen, M. Radermacher, J. N. Turner, and C. L. Rieder, J. Electron Microsc. Tech. 6, 193 (1987).
14. H. B. Zhang, C. Yang, and A. Takaoka, J. Electron Microsc. 53, 617 (2004).
15. Z. H. Levine, Proc. SPIE 5674, 1 (2005).
16. B. F. McEwen and A. B. Heagle, Int. J. Imaging Syst. Technol. 11, 12 (1997).
17. S. P. Frigo, Z. H. Levine, and N. J. Zaluzec, Appl. Phys. Lett. 81, 2112 (2002).
18. Z. H. Levine, J. J. Gao, S. Neogi, T. M. Levin, J. H. Scott, and S. Grantham, J. Appl. Phys. 93, 2193 (2003).
19. H. B. Zhang, C. Yang, J. J. Li, and A. Takaoka, Rev. Sci. Instrum. 76, 056106 (2005).
20. Z. H. Levine, Appl. Phys. Lett. 82, 3943 (2003).
21. Z. H. Levine, J. Appl. Phys. 97, 033101 (2005).
22. A. Takaoka, K. Ura, H. Mori, T. Katsuta, I. Matsui, and S. Hayashi, J. Electron Microsc. 46, 447 (1997).
23. Electron Tomography, edited by, J. Frank, (Plenum, New York, 1992).
24. H. B. Zhang, A. Takaoka, and K. Miyauchi, Rev. Sci. Instrum. 69, 4008 (1998).
25. D. C. Joy, Monte Carlo Modeling for Electron Microscopy and Microanalysis (Oxford, New York, 1995).
26. L. Reimer, Transmission Electron Microscopy (Springer, Berlin, 1993).
27. J. R. Kremer, D. N. Mastronarde, and J. R. McIntosh, J. Struct. Biol. 116, 71 (1996).
28. http://bio3d.colorado.edu/imod/doc/tomoguide.html
29. See, for example, K. N. Tu, J. Appl. Phys. 94, 5451 (2003).
30. M. Unser, C. O. S. Sorzano, P. Thevenaz, S. Jonic, C. El-Bez, S. De Carlo, J. F. Conway, and B. L. Trus, J. Struct. Biol. 149, 243 (2005).
31. R. J. Feng, T. Watanabe, and A. Takaoka, Proceedings of the 16th International Microscopy Congress (Publication Committee of IMC16, Sapporo, 2006), p. 698.