Photoelectron spectroscopy and secondary ion mass spectrometry characterization of diamond-like carbon films

Thin Solid Films

Volumn 515, Issue 13, 2007, Pages 5386-5390

  Matolin V ^a,b   Matolinova I ^a   Veltruska K ^a   Masek K ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

^b SINCROTRONE TRIESTE   (Italy)

Author keywords

Diamond like carbon; Photoelectron spectroscopy; SIMS; TDS

Indexed keywords

EXCITATION ENERGY; PHOTOELECTRON SPECTROSCOPY; PHOTONS; SECONDARY ION MASS SPECTROMETRY; THERMAL DESORPTION SPECTROSCOPY; VALENCE BANDS;

AMORPHOUS CARBON SURFACE; RADIATION PHOTOELECTRON SPECTROSCOPY; SAMPLE ANNEALING; TDS;

DIAMOND LIKE CARBON FILMS;

EID: 33947722009     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.12.028     Document Type: Article

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