2D spatial control of metal nanoparticles by multi laser-lithography and heavy-ion irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 20-24

  Wang, Haisong ^a   Takeda, Yoshihiko ^a   Umeda, Naoki ^a   Kono, Kenichiro ^a   Kishimoto, Naoki ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Ion implantation; Lithography; Nanoparticle; Spatial control

Indexed keywords

HEAVY IONS; ION BOMBARDMENT; ION IMPLANTATION; LASER THEORY; PHOTOLITHOGRAPHY; SUBSTRATES;

LASER LITHOGRAPHY; PATTERNED STRUCTURES; SILICA SUBSTRATES; SPATIAL CONTROL;

NANOPARTICLES;

EID: 33947677534     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.12.120     Document Type: Article

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