Nano-cluster formation in Ge+Sn implanted SiO2 layers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 60-63

  Gaiduk, P I ^a   Prokoph'ev, S L ^a   Kazuchits, N M ^a   Plebanovich, V I ^b   Wesch, W ^c   Nylandsted Larsen, A ^d  

^a BELARUSIAN STATE UNIVERSITY   (Belarus)

^b Integral RPC   (Belarus)

^c FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^d AARHUS UNIVERSITY   (Denmark)

Author keywords

GeSn nano clusters; Ion implantation; TEM

Indexed keywords

CATHODOLUMINESCENCE; GERMANIUM; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEGREGATION (METALLOGRAPHY); SILICA; TRANSMISSION ELECTRON MICROSCOPY;

GESN NANO-CLUSTERS; NANO-CLUSTER FORMATION; TRANSMISSION ELECTRON DIFFRACTION (TED);

NANOCLUSTERS;

EID: 33947676262     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.12.116     Document Type: Article

References (15)

1. He G., and Atwater H.A. Phys. Rev. Lett. 79 (1997) 1937
2. Jenkins D.W., and Dow J.D. Phys. Rev. B 36 (1987) 7994
3. Ragan R., Min K.S., and Atwater H.A. Mater. Sci. Eng. 87 (2001) 204
4. Ragan R., and Atwater H.A. Appl. Phys. Lett. 77 (2000) 3418
5. Shiryaev S.Yu., and Larsen A.N. Nucl. Instrum. Methods B 80/81 (1993) 846
6. Meldrum A., Boatner L.A., White C.W., and Ewing R.C. Mater. Res. Innov. 3 (2000) 190
7. R. Ragan, Direct Energy Bandgap Group IV Alloys and Nanostructures, Dissertation, Pasadena, CA, 2002.
8. Perez-Podriguez A., Gonzalez-Varona O., Garrido B., Pellegrino P., Morante J.R., Bonafos C., Carrada M., and Claverie A. J. Appl. Phys. 94 (2003) 254
9. Cheylan S., Elliman R.G., Gaff K., and Durandet A. Appl. Phys. Lett. 78 (2001) 1670
10. Lee W.S., Jeong J.Y., Kim H.B., Chae K.H., Whang C.N., Im S., and Song J.H. Appl. Surf. Sci. 169-170 (2001) 463
11. Rebohle L., von Borany J., Frob H., and Skorupa W. Appl. Phys. B: Lasers Opt. B 71 (2000) 131
12. Rebohle L., et al. Appl. Phys. B 71 (2000) 131
13. Fujimaki M., Ohki Y., and Nishikawa H. J. Appl. Phys. 81 (1997) 745
14. Song H.Z., Bao X.M., Li N.S., and Zhang J.Y. J. Appl. Phys. 82 (1997) 4028
15. Rebohle L., von Borany J., Yankov R.A., Skorupa W., Tyschenko I.E., Frob H., and Leo K. Appl. Phys. Lett. 71 (1997) 2809