Palladium-silver thin film for hydrogen sensing

Sensors and Actuators, B: Chemical

Volumn 123, Issue 1, 2007, Pages 101-106

  Wang, Min ^a   Feng, Ying ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Gas sensor; Hydrogen sensor; Microfabrication; Palladium silver; Thin film

Indexed keywords

ALUMINA; CHEMICAL SENSORS; ELECTRON BEAMS; HYDROGEN; MICROFABRICATION; PALLADIUM; SILVER;

ATOMIC RATIO; ELECTRON BEAM VACUUM EVAPORATION; HYDROGEN SENSORS; PALLADIUM-SILVER THIN FILMS;

THIN FILM CIRCUITS;

EID: 33947667792     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.07.030     Document Type: Article

References (17)

1. Hughes R.C., Schubert W.K., Zipperian T.E., Rodriguez J.L., and Plut T.A. Thin-film palladium and silver alloys and layers for metal-insulator-semiconductor sensors. J. Appl. Phys. 62 (1987) 1074-1083
2. Wolfe D.B., Love J.C., Paul K.E., Chabinyc M.L., and Whitesides G.M. Fabrication of palladium-based microelectronic devices by microcontact printing. Appl. Phys. Lett. 80 (2002) 2222-2224
3. Baba K., Miyagawa U., Watanabe K., and Sakamoto Y. Electrical resistivity changes due to interstitial hydrogen in palladium-rich substitutional alloys. J. Mater. Sci. 25 (1990) 3910-3916
4. Hughes R.C., and Schubert W.K. Thin films of Pd-Ni alloys for detection of high hydrogen concentrations. J. Appl. Phys. 71 (1992) 542-548
5. Cheng Y.T., Li Y., Lisi D., and Wang W.M. Preparation and characterization of Pd/Ni thin films for hydrogen sensing. Sens. Actuators B, Chem. 30 (1996) 11-16
6. 3 substrates by metalorganic chemical vapor deposition for hydrogen sensing. Thin Solid Films 345 (1999) 217-221
7. Kumar P., and Malhotra L.K. Palladium capped samarium thin films as potential hydrogen sensors. Mater. Chem. Phys. 88 (2004) 106-109
8. 10 amorphous alloy. Sens. Actuators B Chem. 104 (2005) 75-79
9. Huang X.M.H., Manolidis M., Seong C.J., and Hone J. Nanomechanical hydrogen sensing. Appl. Phys. Lett. 86 (2005) 143104
10. Lewis F.A. The Palladium Hydrogen System (1967), Academic Press, London p. 50
11. Tong H.D., Gielens F.C., Gardeniers J.G.E., Jansen H.V., van Rijn C.J.M., Elwenspoek M.C., and Nijdam W. Microfabricated palladium-silver alloy membranes and their application in hydrogen separation. Ind. Eng. Chem. Res. 43 (2004) 4182-4187
12. Huang T.C., Wei M.C., and Chen H.I. Preparation of hydrogen-permselective palladium-silver alloy composite membranes by electroless co-deposition. Separ. Purif. Tech. 32 (2003) 239-245
13. Tanaka D.A.P., Tanco M.A.L., Niwa S., Wakui Y., Mizukamia F., Nambab T., and Suzuki T.M. Preparation of palladium and silver alloy membrane on a porous-alumina tube via simultaneous electroless plating. J. Membr. Sci. 247 (2005) 21-27
14. Kurokawa H., Bada K., Koyama M., Kubo M., and Miyamoto A. Development of new kinetic Monte Carlo simulator for hydrogen diffusion process in palladium-silver alloys. Appl. Surf. Sci. 244 (2005) 636-639
15. Shu J., and Grandjean B.P.A. Catalytic palladium-based membrane reactors: review. Can. J. Chem. Eng. 69 (1991) 223-229
16. Wicke E., Brodoesky H., and Züchner H. Hydrogen in palladium and palladium alloys. Topics Appl. Phys. 29 (1978) 73-155
17. Lewis F.A. Palladium-hydrogen system. Platinum Met. Rev. 38 (1994) 112-118