TEM characterization of extended defects induced in Si wafers by H-plasma treatment

Journal of Physics D: Applied Physics

Volumn 40, Issue 2, 2007, Pages 395-400

  Ghica, C ^a   Nistor, L C ^a   Bender, H ^b   Richard, O ^b   Van Tendeloo, G ^c   Ulyashin, A ^d  

^a NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

^b IMEC   (Belgium)

^c UNIVERSITY OF ANTWERP   (Belgium)

^d UNIVERSITY OF OSLO   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; PLASMA THEORY; POINT DEFECTS; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY;

DIFFRACTION CONTRAST ANALYSIS; GEOMETRICAL PHASE METHOD; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY (HRTEM);

SILICON WAFERS;

EID: 33947659969     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/2/016     Document Type: Article

References (24)

1. Pankove J I, Carlson D E, Berkeyheiser J E and Wance R O 1983 Phys. Rev. Lett. 51 2224
2. Johnson N M 1985 Phys. Rev. B 31 5525
3. Johnson N M and Hahn S K 1986 Appl. Phys. Lett. 48 709
4. Bruel M 1996 Nucl. Instrum. Methods Phys. Res. B 108 313
5. Fichtner P F P, Kaschny J R, Behar M, Yankov R A, Mücklich A and Skorupa W 1999 Nucl. Instrum. Methods Phys. Res. B 148 329
6. Qian C, Terreault B and Gujrathi S C 2001 Nucl. Instrum. Methods Phys. Res. B 175-177 711
7. Rangan S, Ashok S, Chen G and Theodore D 2003 Nucl. Instrum. Methods Phys. Res. B 206 417
8. Ushenko A Y and Ulyashin A G 2002 Japan. J. Appl. Phys. 41 5021
9. Johnson N M, Ponce F A, Street R A and Nemanich R J 1987 Phys. Rev. B 35 4166
10. Beaufort M F, Garem H and Lepinoux J 1994 Phil. Mag. 69 881
11. Kim H W, Zho Z H and Reif R 1997 Thin Solid Films 302 169
12. Ulyashin A G, Job R, Fahrner W R, Richard O, Bender H, Claeys C, Simoen E and Grambole D 2002 J. Phys.: Condens. Matter 14 13037
13. Ghica C, Nistor L, Richard O, Bender H, Ulyashin A G and Van Tendeloo G 2004 Proc. 13th European Microscopy Congress (Antwerp) vol 2 ed D Schryvers and J-P Timmermans p 395
14. Ghica C, Nistor L, Richard O, Bender H, Ulyashin A G and Van Tendeloo G 2004 Proc. 13th European Microscopy Congress (Antwerp) vol 2 ed D Schryvers and J-P Timmermans p 405
15. Ghica C, Nistor L, Bender H, Richard O, Van Tendeloo G and Ulyashin A 2006 Phil. Mag. 86 5137
16. Fedina L, Gutakovskii A, Aseev A, Van Landuyt J and Vanhellemont J 1999 Phys. Status Solidi a 171 147
17. Williams D and Carter C B 1996 Transmission Electron Microscopy vol 3 (New York/London: Plenum) p 451
18. Muto S and Takeda S 1995 Phil. Mag. Lett. 72 99
19. Akatsu T, Bourdelle K K, Richtarch C, Faure B and Letertre F 2005 Appl. Phys. Lett. 86 181910
20. Hirsch P B, Howie A, Nicholson R B, Pashley D W and Whelan M J 1967 Electron Microscopy of Thin Crystals (London: Butterworth) p 165
21. Htch M J, Snoeck E and Kilaas R 1998 Ultramicroscopy 74 131
22. Hull D 1975 Introduction to Dislocations 2nd edn (Oxford: Pergamon) p 76
23. Wei Y, Li L and Tsong I S T 1995 Appl. Phys. Lett. 66 1818
24. Job R, Huang Y L, Ma Y, Zölgert B and Düngen W 2005 Mater. Res. Soc. Symp. Proc. 849 KK7.2.1