Deposition of diamond-like carbon films using graphite sputtering in neon dense plasma

Plasma Chemistry and Plasma Processing

Volumn 27, Issue 2, 2007, Pages 127-139

  Zeb, Shaista ^a   Qayyum, A ^a   Sadiq, Mehboob ^a   Shafiq, M ^a   Waheed, A ^b   Zakaullah, M ^a  

^a QUAID I AZAM UNIVERSITY   (Pakistan)

^b PAKISTAN INSTITUTE OF NUCLEAR SCIENCE AND TECHNOLOGY   (Pakistan)

Author keywords

Dense plasma focus; Diamond like carbon (DLC) film; Raman spectroscopy

Indexed keywords

ANGULAR POSITIONS; GRAPHITE SPUTTERING; NEON DENSE PLASMAS;

ANODES; DEPOSITION; GRAPHITE; NEON; PLASMAS; RAMAN SPECTROSCOPY; SPUTTERING; X RAY DIFFRACTION;

DIAMOND LIKE CARBON FILMS;

EID: 33947623019     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11090-006-9040-4     Document Type: Article

References (28)

1. Leopolde S (2005) Plasma Phys Control Fusion, 47:A361
2. Zakaullah M, Waheed A, Ahmad S, Zeb S, Hussain S (2003) Plasma Sources Sci Technol 12:443
3. Zakaullah M, Alamgir K, Shafiq M, Sharif M, Waheed A (2002) IEEE Trans Plasma Sci 30:2089
4. Kant CR, Srivastava MP, Rawat RS (1997) Phys Lett A 226:212
5. Sadiq M, Shafiq M, Waheed A, Ahmad R, Zakaullah M (2006) Phys Lett A 352:150
6. Rawat RS, Srivastava MP, Tandon S, Mansingh A (1993) Phys Rev B 47:4858
7. Savvides N, Window B (1985) J Vac Sci Technol A 6:2386
8. Messier R, Badzian AR, Badzian T, Spear KE, Bachmann P, Roy R (1987) Thin Solid Films 153:1
9. Sadiq M, Ahmad S, Waheed A, Zakaullah M (2006) Plasma Sources Sci Technol 15:295
10. Kant CR, Srivastava MP, Rawat RS (1998) Phys Lett A 239:109
11. Rawat RS, Chew WM, Lee P, White T, Lee S (2003) Surf Coat Technol 173:276
12. Soh LY, Lee P, Shuyan X, Lee S, Rawat RS (2004) IEEE Trans Plasma Sci 32:448
13. Kuo SC, Kunhardt EE, Srivatsa AR (1991) Appl Phys Lett 59:2532
14. Nagai I, Ishitani A, Kuroda H, Yoshikawa M, Nagai N (1990) J Appl Phys 67:2890
15. Aisenberg S, Chabot R (1971) J Appl Phys 42:2953
16. Umehara Y, Murai S, Koide Y, Murakami M (2002) Diamond Relat Mater 11:1429
17. Alessio LD, Salvi AM, Teghil R, Marotta V, Santagata A, Brunetti B, Ferro D, De Maria G (1998) Appl Surf Sci 134:53
18. Pancielejko M, Precht W, Czyzniewksi A (1999) Vacuum 53:57
19. He X-M, Li W-Z, Li H-D (1994) J Mater Res 9:2355
20. Shroder RE, Nemanich RJ, Glass JT (1990) Phys Rev B 41:3738
21. Zakaullah M, Ahmed I, Omer A, Murtaza G, Beg MM (1996) Plasma Sources Sci Technol 5:544
22. Mather JW (1965) Phys Fluids 8:366
23. Stygar W, Gerdin G, Venneri F, Mandrekas J (1982) Nucl Fusion 22:1161
24. Tamor MA, Vassell WC (1994) J Appl Phys 76:3823
25. Zhang S, Zeng XT, Xie H, Hing P (2000) Surf Coat Technol 123:256
26. Marchon B, Vo PN, Khan MR, Ager JW III (1991) IEEE Trans Magnet 7:5160
27. Ager III JW (1993) IEEE Trans Magnet 7:5160
28. Ferrari AC, Robertson J (2000) Phys Rev B 61:14095