Design of a micromanipulation system for high temperature operation in an environmental scanning electron microscope (ESEM)

Journal of Micromechanics and Microengineering

Volumn 17, Issue 1, 2007, Pages 104-114

  Samara Ratna, P ^a   Atkinson, H V ^a   Stevenson, T ^a   Hainsworth, S V ^a   Sykes, J ^a  

^a UNIVERSITY OF LEICESTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; FERMIUM; HEATING; HIGH TEMPERATURE APPLICATIONS; MICROELECTRONICS; PIEZOELECTRICITY;

ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE (ESEM); HEATED POWER SYSTEMS; MICROMANIPULATION SYSTEMS;

MICROMECHANICS;

EID: 33947597692     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/1/014     Document Type: Article

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