Two-chamber integrated multichannel narrowband filter prepared by a multistep etching method

Applied Optics

Volumn 46, Issue 6, 2007, Pages 867-871

  Jiao, Hongfei ^a   Wu, Yonggang ^a   Tian, Guoxun ^a   Wang, Shaowei ^b   Cao, Hong ^a   Zhang, Li ^a   Fu, Lianxiao ^a  

^a TONGJI UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF TECHNICAL PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FULL WIDTH AT HALF MAXIMUM; INTEGRATED OPTICS; OPACITY; WAVELENGTH;

INTEGRATED MULTICHANNEL FILTERS; ION ETCHING; ION ETCHING MACHINES; NARROWBAND FILTERS;

OPTICAL FILTERS;

EID: 33947541078     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.000867     Document Type: Article

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