Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal

Wuli Xuebao/Acta Physica Sinica

Volumn 56, Issue 2, 2007, Pages 977-981

  Ma, Xiao Tao ^a   Zheng, Wan Hua ^a   Ren, Gang ^a   Fan, Zhong Chao ^a   Chen, Liang Hui ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

C12 BC13; Inductively coupled plasma; InP InGaAsP; Low bias etching; Two dimensional photonic crystal

Indexed keywords

EID: 33947493664     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)