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Volumn 879, Issue , 2007, Pages 1813-1816
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A two magnetron sputter deposition chamber equipped with an additional ion gun for in situ observation of thin film growth and surface modification by synchrotron radiation scattering
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Author keywords
Deposition by sputtering; Thin film structure and morphology; X ray diffraction
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Indexed keywords
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EID: 33947425085
PISSN: 0094243X
EISSN: 15517616
Source Type: Conference Proceeding
DOI: 10.1063/1.2436422 Document Type: Conference Paper |
Times cited : (11)
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References (11)
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