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Volumn 879, Issue , 2007, Pages 1813-1816

A two magnetron sputter deposition chamber equipped with an additional ion gun for in situ observation of thin film growth and surface modification by synchrotron radiation scattering

Author keywords

Deposition by sputtering; Thin film structure and morphology; X ray diffraction

Indexed keywords


EID: 33947425085     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2436422     Document Type: Conference Paper
Times cited : (11)

References (11)
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    • 246, 809 Country Way, North Scituate, MA 02060, U.S.A
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    • Box, P.O.1
  • 3
    • 33947406547 scopus 로고    scopus 로고
    • http://www.tectra.de/heater.htm#BORALECTRIC%AE
  • 4
    • 33947401195 scopus 로고    scopus 로고
    • 13, 50259 Pulheim, Germany
    • Kremer Vakuumphysik, Chorbuschstr. 13, 50259 Pulheim, Germany, http://www.kremer-vakuumphysik.de
    • Kremer Vakuumphysik, C.1
  • 6
    • 0037083827 scopus 로고    scopus 로고
    • N. Schell et al., J. Appl. Phys. 91, 2037-2044 (2002).
    • (2002) J. Appl. Phys , vol.91 , pp. 2037-2044
    • Schell, N.1
  • 9
    • 24944470325 scopus 로고    scopus 로고
    • N. Schell et al., Appl. Phys. A 81, 1441-1445 (2005).
    • (2005) Appl. Phys. A , vol.81 , pp. 1441-1445
    • Schell, N.1
  • 11
    • 33947409701 scopus 로고    scopus 로고
    • W. Möller and M. Posselt, Tridyn-FZR User Manual, Wiss.-Tech. Berichte, FZR-317, 2001.
    • W. Möller and M. Posselt, Tridyn-FZR User Manual, Wiss.-Tech. Berichte, FZR-317, 2001.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.