Smallest lithographic marks generated by optical focusing systems

Optics Letters

Volumn 32, Issue 8, 2007, Pages 976-978

  Grosjean, T ^a   Courjon, D ^a   Bainier, C ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHIC MARKS; OPTICAL FOCUSING SYSTEMS; PHOTOSENSITIVE MATERIALS;

LIGHT; LITHOGRAPHY; OPTICAL DATA STORAGE; PHOTOSENSITIVITY; POLARIZATION;

OPTICAL SYSTEMS;

EID: 33947410300     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.32.000976     Document Type: Article

References (20)

1. T. D. Muster, Opt. Photonics News 16(3), 28 (2005).
2. T. Grosjean, F. I. Baida, and D. Courjon, "Conical optics: the solution of confine light," Appl. Opt. (to be published).
3. T. Grosjean and D. Courjon, "Smallest focal spots," Opt. Commun. (to be published).
4. T. Grosjean and D. Courjon, Opt. Express 14, 2203 (2006).
5. Y. Gilbert, R. Bachelot, P. Royer, A. Bouhelier, G. P. Wiederrecht, and L. Novotny, Opt. Lett. 31, 613 (2006).
6. L. E. Helseth, Opt. Commun. 191, 161 (2001).
7. R. M. Herman and T. A. Wiggins, J. Opt. Soc. Am. A 8, 932 (1991).
8. G. Scott and N. McArdle, Opt. Eng. 31, 2640 (1992).
9. R. Piron, E. Toussaere, D. Josse, and J. Zyss, Appl. Phys. Lett. 77, 2461 (2000).
10. P. Rochon, E. Batalla, and A. Natansohn, Appl. Phys. Lett. 66, 136 (1995).
11. D. Y. Kim, S. K. Triparthy, L. Li, and J. Kumar, Appl. Phys. Lett. 66, 1166 (1995).
12. T. Grosjean, D. Courjon, and M. Spajer, Opt. Commun. 203, 1 (2002).
13. K. Karraï and R. D. Grober, Ultramicros copy 61, 197 (1995).
14. T. Grosjean and D. Courjon, Phys. Rev. E 67, 46611 (2003).
15. K. S. Youngworth and T. G. Brown, Opt. Express 7, 77 (2000).
16. Z. Bouchal and M. Olivik, J. Mod. Opt. 42, 1555 (1995).
17. Ph. Prêtre, L.-M. Wu, A. Knoesen, and J. D. Swalen, J. Opt. Soc. Am. A 15, 359 (1998).
18. T. Grosjean, D. Courjon, and D. Van Labeke J. Microsc. 210, 319 (2003).
19. E. Descrovi, V. Paeder, L. Vaccaro, and H.-P. Herzig, Opt. Express 13, 7017 (2005).
20. Q. Zhan, Opt. Lett. 31, 1726 (2006).