XPS studies on aluminum ions modified polyimide with the PIII technique

Journal of Applied Physics

Volumn 101, Issue 5, 2007, Pages

  Han, Zhao Jun ^a   Tay, Beng Kang ^a   Ha, Peter C T ^a   Sze, Jia Yin ^b   Chua, Daniel H C ^c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b DATA STORAGE INSTITUTE   (Singapore)

^c NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CHEMICAL BONDS; FLOW RATE; ION IMPLANTATION; PLASMA DENSITY; X RAY PHOTOELECTRON SPECTROSCOPY;

ALUMINUM IONS; OXYGEN ATOMS; OXYGEN GASES; PIII TECHNIQUE; POLYIMIDE MATRICES;

POLYIMIDES;

EID: 33947403249     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2709578     Document Type: Article

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