Energy loss and straggling of heavy ions in silicon nitride in the low MeV energy range

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 256, Issue 2, 2007, Pages 586-590

  Sun, G ^a   Dobeli M ^a   Muller A M ^a   Stocker, M ^a   Suter, M ^a   Wacker, L ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Energy loss; Energy straggling; Silicon nitride

Indexed keywords

ELECTRON BEAMS; ELECTRON ENERGY LEVELS; ELECTRONIC STRUCTURE; ENERGY DISSIPATION; HEAVY IONS; IONIZATION OF GASES;

BOHR STRAGGLING; ELECTROSTATIC DEFLECTOR; ENERGY STRAGGLING;

SILICON NITRIDE;

EID: 33947309263     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.12.184     Document Type: Article

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