Ultra-smooth metal surfaces generated by pressure-induced surface deformation of thin metal films

Applied Physics A: Materials Science and Processing

Volumn 87, Issue 2, 2007, Pages 187-192

  Logeeswaran, V J ^a   Chan, M L ^a   Bayam, Y ^a   Islam, M Saif ^a   Horsley, D A ^a   Li, X ^b   Wu, W ^b   Wang, S Y ^b   Williams, R S ^b  

^a University of California   (United States)

^b HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELECTROMAGNETIC WAVE SCATTERING; ELECTRONIC EQUIPMENT; PRESSING (FORMING); SURFACE PROPERTIES; THIN FILMS; VACUUM DEPOSITION;

METAMATERIALS; PLASMONIC NANODEVICES; ULTRA-FLAT PLANES; ULTRA-SMOOTH SURFACE GENERATION; VACUUM DEPOSITED METAL FILMS;

METALLIC FILMS;

EID: 33947206826     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-006-3836-1     Document Type: Article

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