Change of the argon-based atmospheric pressure large area plasma characteristics by the helium and oxygen gas mixing

Thin Solid Films

Volumn 515, Issue 12, 2007, Pages 4909-4912

  Rhee, J K ^a   Kim, D B ^a   Moon, S Y ^a   Choe, W ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Atmospheric plasma; Gas mixing; Large area plasma

Indexed keywords

ARGON; ATMOSPHERIC PRESSURE; ELECTRIC BREAKDOWN; ENERGY DISSIPATION; HELIUM; PLASMA DIAGNOSTICS;

ATMOSPHERIC PLASMAS; GAS MIXING; LARGE AREA PLASMAS; PLASMA CHARACTERISTICS;

MIXING;

EID: 33947188018     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.10.038     Document Type: Article

References (7)

1. Roth J.R. Industrial Plasma Engineering. Applications to nonthermal plasma processing vol. 2 (2001), IOP Publishing, Philadelphia
2. Park J., Henins I., Herrmann H.W., and Selwyn G.S. J. Appl. Phys. 89 (2001) 20
3. Moon S.Y., and Choe W. Appl. Phys. Lett. 84 (2004) 188
4. Simek M., and De Benedictis S. Plasma Chem. Plasma Process. 15 (1995) 451
5. Moon S.Y., and Choe W. Spectrochim. Acta Part B 58 (2003) 297
6. Grill A. Cold Plasma in Material Fabrication (1994), IEEE Press, New York
7. Bol'shakov A.A., Cruden B.A., Mogul R., Rao M.V.V.S., Sharma S.P., Khare B.N., and Meyyappan M. AIAA J. 42 (2004) 823