An analytical energy-loss line shape for high depth resolution in ion-beam analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 256, Issue 1, 2007, Pages 92-96

  Grande, P L ^a   Hentz, A ^a   Pezzi, R P ^a,b   Baumvol, I J R ^a,c   Schiwietz, G ^d  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c UNIVERSITY OF CAXIAS DO SUL   (Brazil)

^d HAHN MEITNER INSTITUT   (Germany)

Author keywords

Ion scattering; Ion beam analysis; Monolayer resolution; Surface physics

Indexed keywords

ENERGY DISSIPATION; GAUSSIAN BEAMS; GAUSSIAN DISTRIBUTION; OPTICAL RESOLVING POWER; PLASMA COLLISION PROCESSES;

ION BEAM ANALYSIS; ION SCATTERING; MONOLAYER RESOLUTION; SURFACE PHYSICS;

ION BEAMS;

EID: 33947142320     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.11.124     Document Type: Article

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