Solvent detection and water monitoring with a macroporous silicon field-effect sensor

IEEE Sensors Journal

Volumn 7, Issue 3, 2007, Pages 329-335

  Clarkson, Jeffrey P ^b   Fauchet, Philippe M ^a,b   Rajalingam, Vimalan ^c   Hirschman, Karl D ^d  

^a IEEE   (United States)

^b UNIVERSITY OF ROCHESTER   (United States)

^c ANALOG DEVICES INC   (United States)

^d Kate Gleason College of Engineering   (United States)

Author keywords

Chemical sensing; Field effect sensor; Flow through; Fluidics; Macroporous silicon; Membrane; Porous silicon; Solvent detection

Indexed keywords

CHEMICAL SENSING; FIELD-EFFECT SENSOR; FLOW-THROUGH; MACROPOROUS SILICON; SOLVENT DETECTION;

CHEMICAL SENSORS; FLUIDICS; MEMBRANES; POROUS SILICON; REAL TIME SYSTEMS; WATER SUPPLY;

SOLVENTS;

EID: 33847737114     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2006.890132     Document Type: Article

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