Investigation of surface mass transport in Al-Si-Ca-oxide glasses via the thermal induced decay of submicron surface gratings

Journal of Applied Physics

Volumn 101, Issue 2, 2007, Pages

  Wang, Linlin ^a   Ellison, Adam J G ^b   Ast, Dieter G ^c  

^a APPLIED MATERIALS INC   (United States)

^b Science and Technology Division   (United States)

^c School of Chemical and Molecular Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALS; DIFFUSION; ETCHING; PHASE DIAGRAMS; VISCOUS FLOW;

CHEMICAL ETCHING; METAL CRYSTALS; OXIDE GLASSES; SURFACE TRANSPORT;

MASS TRANSFER;

EID: 33847731478     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2400085     Document Type: Article

References (61)

1. W. W. Mullins, J. Appl. Phys. 30, 77 (1959).
2. S. Tanaka, C. C. Umbach, and J. M. Blakely, Appl. Phys. Lett. 68, 1966 (1996).
3. S. Tanaka, Ph.D. thesis, Cornell University, 1997.
4. H. P. Bonzel and N. A. Gjostein, J. Appl. Phys. 39, 3480 (1968).
5. P. S. Maiya and J. M. Blakely, J. Appl. Phys. 38, 698 (1967).
6. P. S. Maiya and J. M. Blakely, Appl. Phys. Lett. 7, 60 (1965).
7. J. M. Blakely and H. Mykura, Acta Metall. 10, 565 (1962).
8. J. M. Yu and R. Trivedi, Surf. Sci. 125, 396 (1983).
9. K. Yamashita, H. P. Bonzel, and H. Ibach, Appl. Phys. 25, 231 (1981).
10. H. P. Bonzel, E. Preuss, and B. Steffen, Appl. Phys. A: Solids Surf. 35, 1 (1984).
11. M. Ozdemir and A. Zangwill, Phys. Rev. B 42, 5013 (1990).
12. M. A. Dubson and G. Jeffers, Phys. Rev. B 49, 8347 (1994).
13. J. M. Blakely, Introduction to the Properties of Crystal Surfaces (Pergamon, New York 1973), p. 213.
14. Z. L. Liau, V. Diadiuk, J. N. Walpole, and D. E. Mull, Appl. Phys. Lett. 55, 97 (1989).
15. Z. L. Liau, D. E. Mull, C. L. Dennis, R. C. Williamson, and R. G. Waarts, Appl. Phys. Lett. 64, 1484 (1994).
16. Z. L. Liau, J. N. Walpole, D. E. Mull, C. L. Dennis, and L. J. Missaggia, Appl. Phys. Lett. 64, 3368 (1994).
17. J. S. Swenson, Jr., R. A. Fields, and M. H. Abraham, Appl. Phys. Lett. 66, 1304 (1995).
18. C. Herring, in Physics of Powder Metallurgy, edited by, W. E. Kingston, (McGraw-Hill, New York, 1951).
19. F. H. Huang, R. A. Henrichson, and C. Y. Li, Mater. Sci. Res. 10, 173 (1975).
20. T. Maruyama and W. Komatsu, J. Am. Ceram. Soc. 58, 338 (1975).
21. T. K. Gupta, J. Am. Ceram. Soc. 61, 191 (1978).
22. K. Kitazawa, I. Komaki, K. Matsukawa, and K. Fueki, Yogyo Kyokaishi 88, 92 (1980).
23. C. Monty and J. Le Duigou, High Temp. - High Press. 14, 709 (1982).
24. S. J. Bennison and M. P. Harmer, J. Am. Ceram. Soc. 73, 833 (1990).
25. A. Asoga and P. Nikopoulous, J. Am. Ceram. Soc. 77, 954 (1994).
26. J. S. Stölken and A. M. Glaeser, Scr. Metall. Mater. 27, 449 (1992).
27. M. Kitayamaa, J. D. Powersa, L. Kulinskya, and A. M. Glaeser, J. Eur. Ceram. Soc. 19, 2191 (1999).
28. K. Hirao and M. Tomozawa, J. Am. Ceram. Soc. 70, 43 (1987).
29. D. C. Cassidy and N. A. Gjostein, J. Am. Ceram. Soc. 53, 161 (1970).
30. A. Kishi, K. Fueki, and K. Kitazawa, J. Non-Cryst. Solids 33, 95 (1979).
31. T. C. Woo, J. Appl. Phys. 40, 3140 (1969).
32. L. Wang, Ph.D thesis Cornell University, 2005.
33. G. A. Somerjai, Chemistry in Two Dimensions: Surfaces (Cornell University Press, Ithaca, NY, 1981).
34. B. E. Warren, X-ray Diffraction (Addison-Wesley, New York, 1969).
35. C. A. Harper, Handbook of Ceramics, Glasses, and Diamonds (McGraw-Hill, New York, 2001), p. 5.43.
36. A. G. Naumovets, Diffusion and Soft Matter Physics, Proceedings of the 41st Karpacz Winter School of Theoretical Physics on Diffusion and Soft Matter Physics [Physica A, 357, p. 189 (2005)].
37. Free volume theory is based on rather loose arguments and many variants of this theory exist. For a discussion of its validity and application to multicomponent diffusion, see J. A. Wesselingh and A. M. Bollen, Trans. Inst. Chem. Eng., Part A 75, 590 (1997).
38. J.-L. Shi, Y. Deguchi, and Y. Sakabe, J. Mater. Sci. 40, 5711 (2005).
39. F. A. Leon, IEEE Trans. Comput.-Aided Des. 7, 168 (1988).
40. M. Fujinaga, I. Tottori, T. Kunikiyo, T. Uchida, N. Kotani, and K. Tsukamoto, IEEE Trans. Comput.-Aided Des. 14, 631 (1995); NUPAD IV Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits, 1992 (unpublished).
41. M. Fujinaga, I. Tottori, T. Kunikiyo, T. Uchida, N. Kotani, and K. Tsukamoto, IEEE Trans. Comput.-Aided Des. 14, 631 (1995); NUPAD IV Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits, 1992 (unpublished).
42. L. K. White, N. A. Miszkowski, W. A. Kurylo, and J. M. Shaw, J. Electrochem. Soc. 139, 822 (1992).
43. H. Scholze, Glass Ind. 47, 546 (1966); H. Scholze, Glass Ind. 47, 622 (1966); H. Scholze, Glass Ind. 47, 670 (1966).
44. H. Scholze, Glass Ind. 47, 546 (1966); H. Scholze, Glass Ind. 47, 622 (1966); H. Scholze, Glass Ind. 47, 670 (1966).
45. H. Scholze, Glass Ind. 47, 546 (1966); H. Scholze, Glass Ind. 47, 622 (1966); H. Scholze, Glass Ind. 47, 670 (1966).
46. T. P. Seward III and A. K. Varshneya, in Handbook of Ceramics, Glasses, and Diamonds, edited by, C. A. Harper, (McGraw-Hill, New York, 2001), p. 6.29.
47. R. Dieckmann (private communication).
48. M. J. Toplis, Am. Mineral. 83, 480 (1998).
49. M. J. Toplis, D. B. Dingwell, and T. Lenci, Geochim. Cosmochim. Acta 61, 2605 (1997).
50. R. H. Doremus, Glass Science (Wiley, New York, 1973).
51. http://www.webelements.com
52. N. F. Mott, Philos. Mag. B 56, 257 (1987).
53. J. F. Stebbins and Z. Xu, Nature (London) 390, 60 (1997).
54. C. A. Angell, J. Phys. Chem. Solids 49, 863 (1988).
55. T. P. Seward III and A. K. Varshneya, in Handbook of Ceramics, Glasses, and Diamonds, edited by, C. A. Harper, (McGraw-Hill, New York, 2001), p. 6.37.
56. G. Urbain, Rev. Int. Hautes Temp. Refract. 0035-3434 11, 133 (1974) (in French); G. Urbain, Y. Bottinga, and P. Richet, Geochim. Cosmochim. Acta 46, 1061 (1982).
57. G. Urbain, Rev. Int. Hautes Temp. Refract. 0035-3434 11, 133 (1974) (in French); G. Urbain, Y. Bottinga, and P. Richet, Geochim. Cosmochim. Acta 46, 1061 (1982).
58. M. J. Toplis and D. B. Dingwell, Geochim. Cosmochim. Acta 68, 5169 (2004).
59. E. D. Lacy, Phys. Chem. Glasses 4, 234 (1063).
60. J. F. Stebbins, J. V. Oglesby, and S. Kroeker, Am. Mineral. 86, 1307 (2001).
61. J. F. Stebbins and Z. Xu, Nature (London) 390, 60 (1997).