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Volumn 30, Issue 2, 2007, Pages 237-273

A Galerkin method for the simulation of the transient 2-D/2-D and 3-D/3-D linear Boltzmann equation

Author keywords

Boltzmann transport equation; Chemical vapor deposition; Cluster computing; Discontinuous Galerkin method; Spectral Galerkin method

Indexed keywords

CLUSTER COMPUTING; DISCONTINUOUS GALERKIN METHOD; SPECTRAL GALERKIN METHOD; VELOCITY SPACE;

EID: 33847693600     PISSN: 08857474     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10915-005-9069-1     Document Type: Article
Times cited : (22)

References (26)
  • 3
  • 4
    • 0037455598 scopus 로고    scopus 로고
    • A WENO-solver for the transients of Boltzmann-Poisson system for semiconductor devices: Performance and comparisons with Monte Carlo methods
    • Carrillo, J. A., Gamba, I. M., Majorana, A., and Shu, C.-W (2003). A WENO-solver for the transients of Boltzmann-Poisson system for semiconductor devices: Performance and comparisons with Monte Carlo methods. J. Comput. Phys. 184, 498-525.
    • (2003) J. Comput. Phys , vol.184 , pp. 498-525
    • Carrillo, J.A.1    Gamba, I.M.2    Majorana, A.3    Shu, C.-W.4
  • 5
    • 0003287218 scopus 로고
    • The Boltzmann Equation and Its Applications
    • of, Springer-Verlag
    • Cercignani, C. (1988). The Boltzmann Equation and Its Applications, Vol. 67 of Applied Mathematical Sciences. Springer-Verlag.
    • (1988) Applied Mathematical Sciences , vol.67
    • Cercignani, C.1
  • 7
    • 84980134667 scopus 로고
    • Numerical solution of Boltzmann's equation
    • Chorin, A. J. (1972). Numerical solution of Boltzmann's equation. Comm. Pure Appl. Math. 25, 171-186.
    • (1972) Comm. Pure Appl. Math , vol.25 , pp. 171-186
    • Chorin, A.J.1
  • 8
    • 0002718853 scopus 로고    scopus 로고
    • Discontinuous Galerkin Methods: Theory, Computation and Applications
    • Cockburn, B, Karniadakis, G. E, and Shu, C.-W, eds, of, Springer-Verlag
    • Cockburn, B., Karniadakis, G. E., and Shu, C.-W. (eds.) (2000). Discontinuous Galerkin Methods: Theory, Computation and Applications, Vol. 11 of Lecture Notes in Computational Science and Engineering. Springer-Verlag.
    • (2000) Lecture Notes in Computational Science and Engineering , vol.11
  • 9
    • 0001727886 scopus 로고
    • Upwind finite difference solution of Boltzmann equation applied to electron transport in semiconductor devices
    • Fatemi, E., and Odeh, F. (1993). Upwind finite difference solution of Boltzmann equation applied to electron transport in semiconductor devices. J. Comput. Phys. 108, 209-217.
    • (1993) J. Comput. Phys , vol.108 , pp. 209-217
    • Fatemi, E.1    Odeh, F.2
  • 10
    • 0010115780 scopus 로고
    • A feature scale transport and reaction model for atomic layer deposition
    • Swihart, M. T, Allendorf, M. D, and Meyyappan, M, eds, Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Deposition II, 2001
    • Gobbert, M. K., and Cale, T. S. (2001). A feature scale transport and reaction model for atomic layer deposition. In Swihart, M. T., Allendorf, M. D., and Meyyappan, M. (eds.), Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Deposition II, volume 2001-13, The Electrochemical Society Proceedings Series pp. 316-323.
    • (1913) The Electrochemical Society Proceedings Series pp , pp. 316-323
    • Gobbert, M.K.1    Cale, T.S.2
  • 11
    • 32644452082 scopus 로고    scopus 로고
    • A kinetic transport and reaction model and simulator for rarefied gas flow in the transition regime
    • in press
    • Gobbert, M. K., and Cale, T. S. (2006). A kinetic transport and reaction model and simulator for rarefied gas flow in the transition regime. J. Comput. Phys. (in press).
    • (2006) J. Comput. Phys
    • Gobbert, M.K.1    Cale, T.S.2
  • 12
    • 0035998575 scopus 로고    scopus 로고
    • Modeling and simulation of atomic layer deposition at the feature scale
    • Gobbert, M. K., Prasad, V., and Cale, T. S. (2002). Modeling and simulation of atomic layer deposition at the feature scale. J. Vac. Sci. Technol. B 20(3), 1031-1043.
    • (2002) J. Vac. Sci. Technol. B , vol.20 , Issue.3 , pp. 1031-1043
    • Gobbert, M.K.1    Prasad, V.2    Cale, T.S.3
  • 13
    • 0036573704 scopus 로고    scopus 로고
    • Predictive modeling of atomic layer deposition on the feature scale
    • Gobbert, M. K., Prasad, V., and Cale, T. S. (2002). Predictive modeling of atomic layer deposition on the feature scale. Thin Solid Films 410, 129-141.
    • (2002) Thin Solid Films , vol.410 , pp. 129-141
    • Gobbert, M.K.1    Prasad, V.2    Cale, T.S.3
  • 14
    • 0036687390 scopus 로고    scopus 로고
    • Transient adsorption and desorption in micrometer scale features
    • Gobbert, M. K., Webster, S. G., and Cale, T. S. (2002). Transient adsorption and desorption in micrometer scale features. J. Electrochem. Soc. 149(8), G461-G473.
    • (2002) J. Electrochem. Soc , vol.149 , Issue.8
    • Gobbert, M.K.1    Webster, S.G.2    Cale, T.S.3
  • 15
    • 84980081651 scopus 로고
    • On the kinetic theory of rarefied gases
    • Grad, H. (1949). On the kinetic theory of rarefied gases. Commun. Pure Appl. Math. 2, 331-407.
    • (1949) Commun. Pure Appl. Math , vol.2 , pp. 331-407
    • Grad, H.1
  • 18
    • 84974753119 scopus 로고
    • Diffusion approximation of the linear semiconductor Boltzmann equation: Analysis of boundary layers
    • Poupaud, F. (1991). Diffusion approximation of the linear semiconductor Boltzmann equation: Analysis of boundary layers. Asymptotic Anal. 4, 293-317.
    • (1991) Asymptotic Anal , vol.4 , pp. 293-317
    • Poupaud, F.1
  • 20
    • 0037356074 scopus 로고    scopus 로고
    • An adaptive discontinuous Galerkin technique with an orthogonal basis applied to compressible flow problems
    • Remade, J.-F., Flaherty, J. E., and Shephard, M. S. (2003). An adaptive discontinuous Galerkin technique with an orthogonal basis applied to compressible flow problems. SIAM Rev. 45(1), 53-72.
    • (2003) SIAM Rev , vol.45 , Issue.1 , pp. 53-72
    • Remade, J.-F.1    Flaherty, J.E.2    Shephard, M.S.3
  • 21
    • 0034449740 scopus 로고    scopus 로고
    • Space-time discretization of series expansion methods for the Boltzmann transport equation
    • Ringhofer, C. (2000). Space-time discretization of series expansion methods for the Boltzmann transport equation. SIAM J. Numer. Anal. 38(2), 442-465.
    • (2000) SIAM J. Numer. Anal , vol.38 , Issue.2 , pp. 442-465
    • Ringhofer, C.1
  • 22
    • 0035382405 scopus 로고    scopus 로고
    • Moment methods for the semiconductor Boltzmann equation on bounded position domains
    • Ringhofer, C., Schmeiser, C., and Zwirchmayr, A. (2001). Moment methods for the semiconductor Boltzmann equation on bounded position domains. SIAM J. Numer. Anal. 39(3), 1078-1095.
    • (2001) SIAM J. Numer. Anal , vol.39 , Issue.3 , pp. 1078-1095
    • Ringhofer, C.1    Schmeiser, C.2    Zwirchmayr, A.3
  • 23
    • 0002224298 scopus 로고    scopus 로고
    • Convergence of moment methods for linear kinetic equations
    • Schmeiser, C., and Zwirchmayr, A. (1998). Convergence of moment methods for linear kinetic equations. SIAM J. Numer. Anal. 36(1), 74-88.
    • (1998) SIAM J. Numer. Anal , vol.36 , Issue.1 , pp. 74-88
    • Schmeiser, C.1    Zwirchmayr, A.2
  • 25
    • 32644436501 scopus 로고
    • Transient 3-D/3-D transport and reactant-wafer interactions: Adsorption and desorption
    • Timans, P, Gusev, E, Roozeboom, F, Ozturk, M, and Kwong, D. L, eds, Rapid Thermal and Other Short-Time Processing Technologies III, 2002
    • Webster, S. G., Gobbert, M. K., and Cale, T. S. (2002). Transient 3-D/3-D transport and reactant-wafer interactions: Adsorption and desorption. In Timans, P., Gusev, E., Roozeboom, F., Ozturk, M., and Kwong, D. L. (eds.), Rapid Thermal and Other Short-Time Processing Technologies III, volume 2002-11, The Electrochemical Society Proceedings Series, pp. 81-88.
    • (1911) The Electrochemical Society Proceedings Series , pp. 81-88
    • Webster, S.G.1    Gobbert, M.K.2    Cale, T.S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.