Laser activation-modification of semiconductor surfaces (LAMSS) of 1-alkenes on silicon: A ToF-SIMS, chemometrics, and AFM analysis

Applied Surface Science

Volumn 253, Issue 12, 2007, Pages 5375-5386

  Pei, Lei ^a   Jiang, Guilin ^a,b   Davis, Robert C ^a   Shaver, Jeremy M ^c   Smentkowski, Vincent S ^d   Asplund, Matthew C ^a   Linford, Matthew R ^a  

^a Brigham Young University   (United States)

^b University of Washington   (United States)

^c EIGENVECTOR RESEARCH INC   (United States)

^d GE GLOBAL RESEARCH   (United States)

Author keywords

Chemometrics; Laser; MCR; Silicon; ToF SIMS

Indexed keywords

IMAGE ANALYSIS; LASER APPLICATIONS; PRINCIPAL COMPONENT ANALYSIS; SECONDARY ION MASS SPECTROMETRY;

CHEMOMETRICS; LASER-ACTIVATED SPOTS; SPECTRAL IMAGES;

SURFACE PHENOMENA;

EID: 33847639281     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.12.027     Document Type: Article

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