Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1899-1902

  Stahl, H ^a   Hoechst, A ^a   Fischer, F ^a   Metzger, L ^a   Reichenbach, R ^a   Laermer, F ^a   Kronmueller, S ^a   Breitschwerdt, K ^a   Gunn, R ^b   Watcham, S ^b   Rusu, C ^c   Witvrouw, A ^c  

^a ROBERT BOSCH GMBH   (Germany)

^b Surface Technology Systems plc   (United Kingdom)

^c IMEC   (Belgium)

Author keywords

Acceleration; Accelerometers; CMOS process; Encapsulation; Etching; Microelectromechanical devices; Micromechanical devices; Protection; Silicon; Thin film sensors

Indexed keywords

ACCELERATION; ACCELEROMETERS; ACTUATORS; CMOS INTEGRATED CIRCUITS; ENCAPSULATION; ETCHING; MECHANICAL STABILITY; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; POLYCRYSTALLINE MATERIALS; POLYSILICON; SILICON; SILICON WAFERS; THIN FILMS; TRANSDUCERS;

ACCELERATION SENSORS; CMOS PROCESSS; MICROMECHANICAL DEVICE; PROTECTION; SACRIFICIAL ETCHING; THIN FILM ENCAPSULATION; THIN FILM SENSORS; WAFER-LEVEL ENCAPSULATION;

SOLID-STATE SENSORS;

EID: 33847617690     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217162     Document Type: Conference Paper

References (5)

1. Lebouitz et al., 'Vacuum Encapsulation Of Resonant Devices Using Permeable Polysilicon', Proc. 12th Int. Workshop MEMS, Orlando (1999)
2. Tsuchiya et al. 'Polysilicon Vibrating Gyroscope Vacuum-Encapsulated In An On-Chip Micro Chamber', Sensors and Actuators A, 90 (2001) 49
3. Partridge et al., 'New Thin Film Epitaxial Polysilicon Encapsulation For Piezoresistive Accelerometers', 14th int. Conf. Micro Electro Mechanical Systems (MEMS'01), Interlaken (2001) 54.
4. Metzger, L. 'Silizium-Opferschichttechnologie fuer die Herstellung von Sensoren in Oberflaechenmikromechanik', PhD thesis, RWTH Aachen (2003)
5. Offenberg et al., 'Acceleration Sensor In Surface Micromachining For Airbag applications With High Signal/Noise Ratio', SAE Technical Paper Series, 960758 (1996) 35