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Volumn 112, Issue 1, 2007, Pages 25-38

Will future measurement needs of the semiconductor industry be met?

Author keywords

Economic forces; Measurement needs; Metrology; Semiconductor industry; Standards; Technological innovation; Technology roadmaps; United States Measurement System (USMS)

Indexed keywords

INDUSTRIAL ECONOMICS; SEMICONDUCTOR DEVICES; STANDARDS; SUSTAINABLE DEVELOPMENT; TECHNOLOGY TRANSFER;

EID: 33847342062     PISSN: 1044677X     EISSN: None     Source Type: Journal    
DOI: 10.6028/jres.112.002     Document Type: Article
Times cited : (9)

References (30)
  • 1
    • 33847412961 scopus 로고    scopus 로고
    • An Assessment of the United States Measurement System: Addressing Measurement Barriers to Accelerate Innovation, MIST Special Publication 1048, Gaithersburg, MD. January 2007. This report is available for downloading at
    • An Assessment of the United States Measurement System: Addressing Measurement Barriers to Accelerate Innovation, MIST Special Publication 1048, Gaithersburg, MD. January 2007. This report is available for downloading at http://usms.nist.gov/.
  • 2
    • 0004245602 scopus 로고    scopus 로고
    • Semiconductor Industry Association, 2005 edition. SEMATECH:Austin, TX, and, Links/2005ITRS/ ExecSum2005.pdfhttp://www.itrs.net/Links/2005ITRS/ Metrology2005.pdf
    • Semiconductor Industry Association., The International Technology Roadmap for Semiconductors, 2005 edition. SEMATECH:Austin, TX, http://www.itrs.net/ Links/2005ITRS/ ExecSum2005.pdf and http://www.itrs.net/Links/2005ITRS/ Metrology2005.pdf.
    • The International Technology Roadmap for Semiconductors
  • 3
    • 33847359354 scopus 로고    scopus 로고
    • International Electronics Manufacturing Initiative, 2004 Edition, Herndon, VA
    • International Electronics Manufacturing Initiative, The International Electronics Manufacturing Initiative Roadmaps, 2004 Edition, Herndon, VA, http://www.inemi.org, page 8.
    • The International Electronics Manufacturing Initiative Roadmaps , pp. 8
  • 4
    • 33847376172 scopus 로고    scopus 로고
    • 16 November 2005 SIAPress Release, SIA Forecast: Chip Sales Will Surpass $300 Billion in 2008, http://www.sia-online.org/pre release.cfm?ID-386, page 2
    • 16 November 2005 SIAPress Release, SIA Forecast: Chip Sales Will Surpass $300 Billion in 2008, http://www.sia-online.org/pre release.cfm?ID-386, page 2
  • 5
    • 33847381721 scopus 로고    scopus 로고
    • 2005 SIA Annual Report, http://www.sia-online.org/down loads/SIA_AR._2005.pdf, page 1.
    • 2005 SIA Annual Report, http://www.sia-online.org/down loads/SIA_AR._2005.pdf, page 1.
  • 6
    • 33847383100 scopus 로고    scopus 로고
    • 2005 SIA Annual Report, http://www.sia-online.org/down loads/SIA_AR_2005.pdf, page 14.
    • 2005 SIA Annual Report, http://www.sia-online.org/down loads/SIA_AR_2005.pdf, page 14.
  • 7
    • 33847384790 scopus 로고    scopus 로고
    • 2006 SIA Annual Report, http://www.sia-online.org/down loads/SIA_AR_2006.pdf. page 9.
    • 2006 SIA Annual Report, http://www.sia-online.org/down loads/SIA_AR_2006.pdf. page 9.
  • 8
    • 33847413852 scopus 로고    scopus 로고
    • 16 November 2005 SIA Press Release, SIA Forecast: Chip Sales Will Surpass S300 Billion in 2008, http://www.sia-online.org/pre_release.cfm?ID~386, page 1.
    • 16 November 2005 SIA Press Release, SIA Forecast: Chip Sales Will Surpass S300 Billion in 2008, http://www.sia-online.org/pre_release.cfm?ID~386, page 1.
  • 9
    • 33847400314 scopus 로고    scopus 로고
    • 2006 July, http://www.sia-online.org/pre release.cfm?ID-414.
    • 2006 July, http://www.sia-online.org/pre release.cfm?ID-414.
  • 10
    • 33845257838 scopus 로고    scopus 로고
    • editorial in Semiconductor International, July 29
    • P. H. Singer, Dramatic Gains in Performance on the Horizon, editorial in Semiconductor International, Vol. 29, No. 8 (July 29, 2006) p. 15.
    • (2006) Dramatic Gains in Performance on the Horizon , vol.29 , Issue.8 , pp. 15
    • Singer, P.H.1
  • 11
    • 33847343168 scopus 로고    scopus 로고
    • 2005 SIA Annual Report, http://www.sia-online.org/down loads/SIA_AR_2005.pdf, page 3.
    • 2005 SIA Annual Report, http://www.sia-online.org/down loads/SIA_AR_2005.pdf, page 3.
  • 12
    • 23244448824 scopus 로고    scopus 로고
    • August, Prof. Jackson attributes this quote to Gordon Moore
    • T. N. Jackson, Nature Materials 4. 581 (August 2005). Prof. Jackson attributes this quote to Gordon Moore.
    • (2005) Nature Materials , vol.4 , pp. 581
    • Jackson, T.N.1
  • 14
    • 33847381285 scopus 로고    scopus 로고
    • 2004 iNEMI Roadmap, http://www.inemi.org, page 1.
    • 2004 iNEMI Roadmap, http://www.inemi.org, page 1.
  • 15
    • 33847361637 scopus 로고    scopus 로고
    • SEMI S2, http://webstore.ansi.org/ansidocstore/product.asp? sku-SEMH-S2-0706
    • SEMI S2, http://webstore.ansi.org/ansidocstore/product.asp? sku-SEMH-S2-0706
  • 16
    • 33847339099 scopus 로고    scopus 로고
    • Optical Roadmaps, http://www.spie.org/web/meetings/pro grams/am00/confs/4099.html, http://thor.inemi.org/webdown load/newsroom/ apex2005/2005 ECWC iNEMI Opto Versus_Copper.pdf
    • Optical Roadmaps, http://www.spie.org/web/meetings/pro grams/am00/confs/4099.html, http://thor.inemi.org/webdown load/newsroom/ apex2005/2005 ECWC iNEMI Opto Versus_Copper.pdf
  • 17
    • 33847370072 scopus 로고    scopus 로고
    • 2004 iNEMI Roadmap, http://www.inemi.org, Overview, page 3.
    • 2004 iNEMI Roadmap, http://www.inemi.org, Overview, page 3.
  • 18
    • 33847387329 scopus 로고    scopus 로고
    • NISI Planning Report 98-4. prepared by Technecon Analytic Research, May 1998, private communication, January 2006
    • G. Tassey. NISI" Planning Report 98-4. prepared by Technecon Analytic Research, May 1998, private communication, January 2006.
    • Tassey, G.1
  • 19
    • 33847398937 scopus 로고    scopus 로고
    • 2005 ITRS Executive Summary, http://www.itrs.net/Links/2005 ITRS/ExecSum2005.pdf, page 8.
    • 2005 ITRS Executive Summary, http://www.itrs.net/Links/2005 ITRS/ExecSum2005.pdf, page 8.
  • 20
    • 33847383474 scopus 로고    scopus 로고
    • 2005 ITRS Metrology Chapter, http://www.itrs.net/Links/ 2005ITRS/Metrology2005.pdf
    • 2005 ITRS Metrology Chapter, http://www.itrs.net/Links/ 2005ITRS/Metrology2005.pdf
  • 21
    • 33847339516 scopus 로고    scopus 로고
    • 2005 ITRS Executive Summary
    • 2005 ITRS Executive Summary, http://www.itrs.net/Links/2005 ITRS/ExecSum2005.pdf. page 55.
  • 22
    • 33847341860 scopus 로고    scopus 로고
    • IMEC, moderator for the Evening Panel Discussion at the International Electron Devices Meeting (IEDM) on Semiconductor Research and Development: Who will do it and who will pay for it in 2010?
    • Washington, U.C, December 6
    • Gilbert Declerck, IMEC, moderator for the Evening Panel Discussion at the International Electron Devices Meeting (IEDM) on Semiconductor Research and Development: Who will do it and who will pay for it in 2010? in Technical Digest of International Electron Devices Meeting, Washington, U.C. (December 6, 2005).
    • (2005) Technical Digest of International Electron Devices Meeting
    • Declerck, G.1
  • 23
    • 33847391358 scopus 로고    scopus 로고
    • Nuese, Research Needs vs. Funding for the ITRS
    • 13 October
    • Charles J. Nuese, Research Needs vs. Funding for the ITRS. SRC Internal, Document, 13 October 2003.
    • (2003) SRC Internal, Document
    • Charles, J.1
  • 24
    • 33847379988 scopus 로고    scopus 로고
    • Lewis Tennan, in presentation to the Institute of Electrical and Electronics Engineers (IEEE), Electron Devices Society Administrative Committee Meeting (EDS Admin), Washington, D.C., 4 December 2005.
    • Lewis Tennan, in presentation to the Institute of Electrical and Electronics Engineers (IEEE), Electron Devices Society Administrative Committee Meeting (EDS Admin), Washington, D.C., 4 December 2005.
  • 25
    • 33847420245 scopus 로고    scopus 로고
    • 2006 SIA Annual Report, http://www.sia-online.org/down loads/SIA_AR_2006.pdf, page 13.
    • 2006 SIA Annual Report, http://www.sia-online.org/down loads/SIA_AR_2006.pdf, page 13.
  • 26
    • 33847415234 scopus 로고    scopus 로고
    • 2005 SIA Annual Report, http://www.sia-online.org/down 1oads/SIA_AR_2005.pdf, page 36.
    • 2005 SIA Annual Report, http://www.sia-online.org/down 1oads/SIA_AR_2005.pdf, page 36.
  • 27
    • 33847378689 scopus 로고    scopus 로고
    • http://www.sia-online.org/downloads/Rising Chorus.pdf, page 1.
    • http://www.sia-online.org/downloads/Rising Chorus.pdf, page 1.
  • 29
    • 33847409954 scopus 로고    scopus 로고
    • The Return on Investment in Materials Science, http
    • and, www.accelrys.com/ reference/whitepapers/pub_mod_sim. php
    • IDC 2004 Report entitled Modeling and Simulation: The Return on Investment in Materials Science, http://www.idc.com and http://www.accelrys.com/ reference/whitepapers/pub_mod_sim. php
    • IDC 2004 Report entitled Modeling and Simulation
  • 30
    • 33847415648 scopus 로고    scopus 로고
    • 2005 SIA Annual Report, http://www.sia-online.org/down loads/SIA_AR_200J.pdf, page 15
    • 2005 SIA Annual Report, http://www.sia-online.org/down loads/SIA_AR_200J.pdf, page 15


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