The fabrication of TFTs for LCD using the 3mask process

Proceedings of International Meeting on Information Display

Volumn 2, Issue , 2006, Pages 948-951

  Yoo, Soon Sung ^a   Cho, Heung Lyul ^a   Kwou, Oh Nam ^a   Nam, Seung Hee ^a   Chang, Yoon Gyoung ^a   Kim, Ki Yong ^a   Cha, Soo Yeoul ^a   Ahn, Byung Chul ^a   Chung, In Jae ^a  

^a LG Display Co Ltd   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

LIQUID CRYSTAL DISPLAYS; MACHINE DESIGN; MASKS; PHOTOLITHOGRAPHY; PHOTORESISTORS; PRODUCT DEVELOPMENT;

LIFT OFF PROCESSES; PHOTO RESIST STRIPPER MACHINES; PRODUCTION LINES;

THIN FILM TRANSISTORS;

EID: 33847339413     PISSN: 17387558     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. M. Hatzakis et al, IBM J. Res. Develop, Vol 24, No 4 (1980)
2. Chang Wook Han et al, Asia Display 1998, p1109 (1998)
3. Jean H. Song, et al, Conference digest of SID 2002, p1038 (2002)