Fluid filter fabricated by deep X-ray lithography for micro fluidics

Microsystem Technologies

Volumn 13, Issue 5-6, 2007, Pages 435-439

  Ukita, Yoshiaki ^a   Asano, Toshifumi ^a   Utsumi, Yuichi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY FLOW; COMPUTATIONAL FLUID DYNAMICS; FILTERS (FOR FLUIDS); SURFACE TENSION; X RAY LITHOGRAPHY;

CAPILLARY ARRAYS; LIQUID SURFACE TENSION; MICRO FLUIDICS;

FLUIDICS;

EID: 33847336849     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0218-8     Document Type: Article

References (5)

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2. Emrich CA, Medintz IL, Tian H, Berti L, Mathies RA (2001) Proc μTAS2001, pp 13-15
3. Sato K, Yamanaka M, Tokeshi M, Morishima K, Kitamori T (2003) Proc. μTAS2003, pp 781-784
4. Utsumi Y, Kishimoto T, Mekaru H, Hattori T (2004a) Proc ICEE2004, pp 608-613
5. Utsumi Y, Kishimoto T, Mekaru H, Hara H (2004b) Proc IWMF2004, pp 275-280