Nanostructures on microstructured surfaces

Microsystem Technologies

Volumn 13, Issue 5-6, 2007, Pages 483-486

  Disch, Alexander ^a   Mick, Jörg ^b   Bläsi, Benedikt ^b   Müller, Claas ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; MICROSTRUCTURE; OPTICAL PROJECTORS; PHOTORESISTS;

ANTI-REFLECTIVE LAYERS; FRESNEL LENSES; INTERFERENCE LITHOGRAPHY;

NANOSTRUCTURED MATERIALS;

EID: 33847333729     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0191-2     Document Type: Article

References (3)

1. Disch A (2003) Holographische Mikrostrukturierung prismatischer Oberflächen. Diploma thesis, Laboratory for Process Technology, Department of Microsystems Engineering (IMTEK), University of Freiburg
2. Gombert A (1998) Réseaux diffractifs d'ordre zéro comme surfaces antireflection application aux capteurs solaires. These, Université Strasbourg I
3. Wilson SJ, Hutley MC (1982) The optical properties of moth-eye antireflection surfaces. Opt Acta 29(7):993-1009