Thermal effects on liquid film dynamics in spin coating

Sensors and Actuators, A: Physical

Volumn 134, Issue 1, 2007, Pages 140-145

  Wu, Lin ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

Film depletion; Shock wave; Spin coating; Thermocapillarity; Thermoviscosity; Thin liquid film dynamics

Indexed keywords

HIGH TEMPERATURE EFFECTS; LUBRICATION; NUMERICAL METHODS; SHOCK WAVES; VISCOSITY;

FILM DEPLETION; THERMOCAPILLARITY; THERMOVISCOSITY; THIN LIQUID FILM DYNAMICS;

SPIN COATING;

EID: 33847305013     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.05.008     Document Type: Article

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