On-wafer calibration of sol-gel derived bulk acoustic wave devices

European Solid-State Device Research Conference

Volumn , Issue , 1996, Pages 635-638

  Awang, Zaiki ^a   Miles, Robert E ^b   Milne, Steve J ^b   Tu, Y L ^b  

^a UNIVERSITI TEKNOLOGI MARA   (Malaysia)

^b UNIVERSITY OF LEEDS   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ON-WAFER CALIBRATION;

EID: 33847285996     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Zaiki Awang et al, "Fabrication of BAW resonators using sol-gel derived PZT thin films", Proc. 25th European Solid State Device Research Conf, The Hague, The Netherlands, p 663, (1995)
2. S Arscott, Zaiki Awang, Y L Tu, S J Milne and R E Miles, "PZT BAW resonators for MMIC technology", presented at the 3rd United Kingdom Transducer Materials Workshop, Malvern, UK, Aug 1995
3. Zaiki Awang et. al., "Sol-gel denved bulk acoustic wave devices for cellular communication applications", to be presented at the 1996 IEEE Int. Conf. On Semiconductor Elect, Penang, Malaysia, November 1996
4. 3transducers", J Acoust Soc. Am 24, p 85, (1952)