Integration aspects of RF-MEMS technologies

GAAS 2005 Conference Proceedings - 13th European Gallium Arsenide and Other Compound Semiconductors Application Symposium

Volumn 2005, Issue , 2005, Pages 297-300

  Lisec, T ^a   Wagner, B ^a  

^a FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE NETWORKS; ELECTRONICS PACKAGING; OPTICAL FIBER FABRICATION; PASSIVE NETWORKS; SEMICONDUCTOR SWITCHES;

ACTIVE DEVICES; MEMS SWITCHES; MEMS TECHNOLOGIES; PACKAGING SOLUTIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 33847267365     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)

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