A vacuum-isolated thermal microflowmeter for in-vivo drug delivery

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 668-671

  Li, Y ^a   Baek, K ^a   Gulari, M ^a   Lin, D ^a   Wise, K D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOWMETERS; HEATING; MICROMACHINING; NEUROLOGY; POLYSILICON; PROBES;

CELLULAR LEVEL; DIELECTRIC MEMBRANE; POLYSILICON HEATER; THERMAL MICROFLOWMETER;

CONTROLLED DRUG DELIVERY;

EID: 33847244937     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597787     Document Type: Conference Paper

References (5)

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2. D. Papageorgiou and K. D. Wise, "A shuttered probe with in-line flowmeters for chronic in-vivo drug delivery", Digest IEEE Int. Micro Electro Mechanical Systems Conf., pp. 212-215, January 2001.
3. O. J. Korsh and R. S. Muller, "Conduction properties of lightly doped polycrystalline silicon," Solid-State Electronics, v.21, pp. 1045-1051, 1978.
4. Y. Li, M. N. Gulari, and K. D. Wise, "High-Yield Buried MicroChannel Formation for Drug Delivery at the Cellular Level," 7th Int. Conf. on Miniaturized Chemical and BioChemical Analysis Systems (μTAS'03), Squaw Valley, October 2003.
5. S. Wu, Q. Lin, Y. Yuen, Y.-C. Tai, "MEMS flow sensors for nano-fluidic applications," Sensors and Actuators A, vol. 89, pp. 152-158, 2001.