EM design of an isolated coplanar RE cross for MEMS switch matrix applications

2003 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems - Digest of Papers

Volumn , Issue , 2003, Pages 162-165

  Simon, W ^a   Lauer, A ^a   Schauwecker, B ^b   Wien, A ^a  

^a IMST GMBH   (Germany)

^b DAIMLER AG   (Germany)

Author keywords

Bridge circuits; Finite difference methods; Joining processes; Metallization; Microswitches; Radio frequency; RF signals; Signal design; Time domain analysis; Transmission line matrix methods

Indexed keywords

BALLOONS; BRIDGE CIRCUITS; ELECTRIC SWITCHES; FINITE DIFFERENCE METHOD; FREQUENCY DOMAIN ANALYSIS; INTEGRATED CIRCUITS; MATRIX ALGEBRA; METALLIZING; METALS; RADIO TRANSMISSION; SHEET METAL; SWITCHING SYSTEMS; TIME DOMAIN ANALYSIS;

JOINING PROCESS; MICROSWITCHES; RADIO FREQUENCIES; RF SIGNAL; SIGNAL DESIGN; TRANSMISSION LINE MATRIX METHODS;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 33847167129     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMIC.2003.1196695     Document Type: Conference Paper

References (5)

1. B. Schauwecker, K. M. Strohm, W. Simon, J. Mehner, J.-F. Luy, "Toggle-Switch - A new type of RF MEMS switch for power applications"; IMS2002, pp. 219-222, Seattle, USA, June 2002
2. IMST GmbH, "User and Reference Manual for the 3D EM Time Domain Simulator Empire", http://www.empire.de/empire.pdf, June 2002
3. K. S., Yee: "Numerical solution of initial boundary value problems involving Maxwell's equations in isotropic media." IEEE Trans. Antennas and Propagation. Vol. AP-14, S. 302-307, 1966
4. Allen Taflove "Computational Electrodynamics: The Finite-Difference Time-Domain Method", Artech House, Norwood, MA, 1995
5. W.Simon, B.Schauwecker, A.Lauer, A.Wien: "Designing a novel RF MEMS switch for broadband power applications", European Microwave Conference, pp.519-522, Mailand, September 2002