Characterization of bonded wafer for RF filters with reduced TCF

Proceedings - IEEE Ultrasonics Symposium

Volumn 2, Issue , 2005, Pages 926-929

  Abbott, B P ^a   Chocola, J ^a   Lin, K ^a   Naumenko, Natalya ^b   Caron, J ^c  

^a TRIQUINT SEMICONDUCTOR   (United States)

^b NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY MISIS   (Russian Federation)

^c RF MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHIUM TANTALATE; SAW DUPLEXERS; SKIRT STEEPNESS;

ACOUSTIC SURFACE WAVE DEVICES; INSERTION LOSSES; LITHIUM COMPOUNDS; NATURAL FREQUENCIES; RESONATORS; WAVE FILTERS;

SILICON WAFERS;

EID: 33847160723     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603002     Document Type: Conference Paper

References (10)

1. Matsuda, et al., High-Frequency SAW Duplexer with Low-Loss and Steep Cut-Off Characteristics, Proc. 2002 IEEE Ultrasonics Symposium, pp. 68-73.
2. Tsutsumi, et al., Extremely Low-Loss SAW Filter and Its Application to Antenna Duplexer for the 1.9 GHz PCS Full-Band, Proc. 2003 IEEE Freq. Control Sync., pp. 861-867.
3. Sato, et al., Temperature. Stable SAW Devices Using Directly Bonded LiTaO3/Glass Substrates, Proc. 1998 IEEE Ultra. Symp., pp. 335-338.
4. Kadota, et al., SAW Substrate with Coupling Factor and Excellent Temperature Stability suitable for Duplexer of PCS in US, Proc. 2004 IEEE Ultra. Symp., pp. 1970-1975.
5. Namba, et al. Direct Bonding of Piezoelectric Crystal on Silicon. Appl. Phys. Lett., 67, pp. 3275-3276, 1995.
6. 3 Single Crystal, Jpn. J. Appl. Phys., 33, pp. L1542-L1544, 1994.
7. Namba, et al. Novel Composite Piezoelectric Materials Using Direct Bonding Techniques. Proc. 1995 IEEE Ultras. Symp., pp. 1045-1048.
8. Solal et al., Oriented Lithium Niobate Layers Transferred on 4" (100) Silicon. Wafer for RF SAW Devices, Proc. 2002 IEEE Ultras. Symp.
9. www.ziptronix.com
10. P. Ventura, et al., A new efficient combined FEM and periodic Green's function formalism for the analysis of periodic SAW structures, Proc. 1995 IEEE Ultra. Symp., pp. 263-268.