Mechanical characterization of Ta and TaN diffusion barrier layers using laser acoustics

Proceedings - IEEE Ultrasonics Symposium

Volumn 3, Issue , 2005, Pages 1500-1503

  Profunser, Dieter M ^a,b   Vollmann, Jacqueline ^a   Bryner, Jürg ^a   Dual, Jürg ^a  

^a ETH ZURICH   (Switzerland)

^b HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT LIMITS; LASER ACOUSTICS; TANTALUM NITRIDE; THERMO-ELASTO-MECHANICAL SIMULATION;

DIELECTRIC PROPERTIES; DIFFUSION; LASER PULSES; MICROPROCESSOR CHIPS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TANTALUM; TANTALUM COMPOUNDS; TITANIUM NITRIDE;

ULTRASONICS;

EID: 33847151697     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603142     Document Type: Conference Paper

References (4)

1. C. Thomsen et. al., 'Surface Generation and Detection of Phonons by Picosecond Light Pulses', Physical Review B, Vol. 34, No 6, 1986, pp. 4129-4138.
2. C. Thomsen, H.J. Maris, J. Taue, 'Picosecond Acoustics as a Non-Destructive Tool for the Characterization of very thin Films', Thin Solid Films, Vol. 154, 1987, pp. 217-223.
3. J. Vollmann, D.M. Profunser, and J. Dual, 'Sensitivity improvement of a pump-probe set-up for thin film and microstructure metrology', Ultrasonics, Vol. 40/1-8, pp. 757-763, Elsevier, Amsterdam, 2002.
4. O.B. Wright, V.E. Gusev, 'Ultrafast generation of acoustic waves in copper', IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 42, No. 3, pp. 331-338, May 1995.