Calculation of energy-loss straggling of C, Al, Si, and Cu for fast H, He, and Li ions

Physical Review A - Atomic, Molecular, and Optical Physics

Volumn 75, Issue 2, 2007, Pages

  Montanari, C C ^a,b   Miraglia, J E ^a,b   Heredia Avalos, Santiago ^c   Garcia Molina, Rafael ^c   Abril, Isabel ^d  

^a INSTITUTO DE ASTRONOMÍA Y FÍSICA DEL ESPACIO   (Argentina)

^b UNIVERSIDAD DE BUENOS AIRES   (Argentina)

^c UNIVERSITY OF MURCIA   (Spain)

^d UNIVERSITY OF ALICANTE   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CARBON; DIELECTRIC DEVICES; ELECTRIC CHARGE; IONS; OSCILLATORS (ELECTRONIC); PLASMA APPLICATIONS; SILICON;

BOHR VALUE; DIELECTRIC FORMALISM; MERMIN ENERGY-LOSS FUNCTIONS MODEL; OSCILLATOR STRENGTHS (MELF-GOS);

ATOMIC PHYSICS;

EID: 33847150168     PISSN: 10502947     EISSN: 10941622     Source Type: Journal    
DOI: 10.1103/PhysRevA.75.022903     Document Type: Article

References (82)

1. A. Kawano and Y. Kido, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.340465 63, 75 (1988).
2. M. A. Kumakhov and F. F. Komarov, Energy Loss and Ion Ranges in Solids (Gordon and Breach, New York, 1981).
3. Material Modification by High-Fluence Ion Beams, Vol. 155 of NATO Advanced Study Institute, Series E: Applied Sciences, edited by, R. Kelly, and, M. F. da Silva, (Kluwer, Dordrecht, 1989).
4. M. Prutton, Electronic Properties of Surfaces (Adam Hilger, Bristol, 1984).
5. S. A. Campbell, The Science and Engineering of Microelectronic Fabrication (Oxford University, Oxford, 1996).
6. H. Ryssel and H. Glawischning, Ion Implantation Techniques (Springer, Berlin, 1982).
7. J. Turner, Atoms, Radiation and Radiation Protection, 2nd ed. (Wiley, New York, 1995).
8. G. Kraft, Nucl. Instrum. Methods Phys. Res. A NIMAER 0168-9002 10.1016/S0168-9002(00)00802-0 454, 1 (2000).
9. G. Kraft, Prog. Part. Nucl. Phys. PPNPDB 0146-6410 10.1016/S0146-6410(00) 00112-5 45, S473 (2000).
10. D. W. Moon, H. I. Le, K. J. Kim, T. Nishimura, and Y. Kido, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 183, 181 (2001).
11. F. Besenbacher, J. U. Andersen, and E. Bonderup, Nucl. Instrum. Methods NUIMAL 0029-554X 10.1016/0029-554X(80)91224-0 168, 1 (1980).
12. J. C. Eckardt and G. H. Lantschner, Thin Solid Films THSFAP 0040-6090 10.1016/0040-6090(94)90078-7 249, 11 (1994).
13. M. Famá, J. C. Eckardt, G. H. Lantschner, and N. R. Arista, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.62.062901 62, 062901 (2000).
14. D. G. Arbó, M. S. Gravielle, J. E. Miraglia, J. C. Eckardt, G. H. Lantschner, M. Famá, and N. R. Arista, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.65.042901 65, 042901 (2002).
15. Q. Yang, D. J. O'Connor, and Z. Wang, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 10.1016/0168-583X(91)95454-L 61, 149 (1991).
16. J. Shchuchinsky and C. Peterson, Radiat. Eff. RAEFBL 0033-7579 81, 221 (1984).
17. Y. Kido, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.34.73 34, 73 (1986).
18. Y. Kido, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 24-25, 347 (1987).
19. Y. Kido and T. Koshikawa, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.44.1759 44, 1759 (1991).
20. A. Ikeda, K. Sumimoto, T. Nishiola, and Y. Kido, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 10.1016/0168-583X(95)01511-6 115, 34 (1996).
21. G. Konac, S. Kalbitzer, Ch. Klatt, D. Niemann, and R. Stoll, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 136-138, 159 (1998).
22. J. C. Eckardt and G. H. Lantschner, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 175-177, 93 (2001).
23. M. Tosaki, D. Ohsawa, and Y. Isozumi, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 230, 59 (2005).
24. N. Bohr, K. Dan. Vidensk. Selsk. Mat. Fys. Medd. KDVSAK 0023-3323 18, No. 8 (1948).
25. J. Lindhard and M. Scharff, K. Dan. Vidensk. Selsk. Mat. Fys. Medd. KDVSAK 0023-3323 27, No. 15 (1953).
26. E. Bonderup and P. Hvelplun, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.4.562 4, 562 (1971).
27. C. C. Rousseau, W. K. Chu, and D. Powers, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.4.1066 4, 1066 (1971).
28. M. S. Livingston and H. A. Bethe, Rev. Mod. Phys. RMPHAT 0034-6861 10.1103/RevModPhys.9.245 9, 245 (1937).
29. J. B. Malherbe and H. W. Albertz, Nucl. Instrum. Methods Phys. Res. NIMRD9 0167-5087 192, 559 (1982).
30. P. Sigmund and A. Schinner, Eur. Phys. J. D EPJDF6 1434-6060 23, 201 (2003).
31. H. H. Andersen, A. Csete, T. Ichioka, H. Knudsen, S. P. Moller, and U. I. Uggerhoj, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 10.1016/S0168-583X(02)00692-4 194, 217 (2002).
32. J. Y. Hsu, Y. C. Yu, J. H. Liang, K. M. Chen, and H. Niu, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 219-220, 251 (2004).
33. S. Amadon and W. A. Lanford, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 249, 34 (2006).
34. I. Abril, R. Garcia-Molina, C. D. Denton, F. J. Pérez- Pérez, and N. R. Arista, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.58.357 58, 357 (1998).
35. S. Heredia-Avalos, J. C. Moreno-Marín, I. Abril, and R. Garcia-Molina, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 10.1016/j.nimb.2004.12.028 230, 118 (2005).
36. S. Heredia-Avalos, R. Garcia-Molina, J. M. Fernández-Varea, and I. Abril, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.72.052902 72, 052902 (2005).
37. C. C. Montanari, J. E. Miraglia, and N. R. Arista, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.66.042902 66, 042902 (2002).
38. C. C. Montanari, J. E. Miraglia, and N. R. Arista, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.67.062702 67, 062702 (2003).
39. G. H. Lantschner, J. C. Eckardt, A. F. Lifschitz, N. R. Arista, L. L. Araujo, P. F. Duarte, J. H. R. dos Santos, M. Behar, J. F. Dias, P. L. Grande, C. C. Montanari, and J. E. Miraglia, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.69.062903 69, 062903 (2004).
40. S. Lencinas, J. Burgdorfer, J. Kemmler, O. Heil, K. Kroneberger, N. Keller, H. Rothard, and K. O. Groeneveld, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.41.1435 41, 1435 (1990).
41. J. Lindhard and A. Winther, K. Dan. Vidensk. Selsk. Mat. Fys. Medd. KDVSAK 0023-3323 34, No. 4 (1964).
42. T. Kaneko and Y. Yamamura, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.33.1653 33, 1653 (1986).
43. I. Abril, R. Garcia-Molina, N. R. Arista, and C. F. Sanz-Navarro, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 10.1016/S0168-583X(02)00467-6 190, 89 (2002).
44. The Electronic Handbook of Optical Constants of Solids, edited by, E. D. Palik, and, G. Ghosh, (Academic Press, San Diego, 1999).
45. B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables ADNDAT 0092-640X 54 (1993).
46. N. D. Mermin, Phys. Rev. B PLRBAQ 0556-2805 10.1103/PhysRevB.1.2362 1, 2362 (1970).
47. D. J. Planes, R. Garcia-Molina, I. Abril, and N. R. Arista, J. Electron Spectrosc. Relat. Phenom. JESRAW 0368-2048 10.1016/S0368-2048(96)03043-5 82, 23 (1996).
48. U. Fano, Annu. Rev. Nucl. Sci. ARNUA8 0066-4243 10.1146/annurev.ns.13. 120163.000245 13, 1 (1963).
49. R. F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope (Plenum Press, New York, 1989).
50. E. Shiles, T. Sasaki, M. Inokuti, and D. Y. Smith, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.22.1612 22, 1612 (1980).
51. W. Brandt and M. Kitagawa, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.25.5631 25, 5631 (1982).
52. W. Brandt, Nucl. Instrum. Methods Phys. Res. NIMRD9 0167-5087 194, 13 (1982).
53. S. Heredia-Avalos and R. Garcia-Molina, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 10.1016/S0168-583X(02)00720-6 193, 15 (2002).
54. K. P. Huber, in American Institute of Physics Handbook, edited by, B. H. Billins, H. P. R. Frederikse, D. F. Bleil, R. B. Lindsay, R. K. Cook, J. B. Marion, H. M. Crosswhite, and, M. W. Zemansky, coordinating editor, D. E. Gray, (McGraw-Hill, New York, 1972), pp. 7-168.
55. J. C. Moreno-Marín, I. Abril, S. Heredia-Avalos, and R. Garcia-Molina, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 249, 29 (2006).
56. Y.-N. Wang and T.-C. Ma, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.50.3192 50, 3192 (1994).
57. W. K. Chu and D. Powers, Phys. Lett. PYLAAG 0375-9601 10.1016/0375-9601(72)90181-8 40A, 23 (1972).
58. C. M. Kwei, T. L. Lin, and C. J. Tung, J. Phys. B JPAPEH 0953-4075 10.1088/0953-4075/21/16/015 21, 2901 (1988).
59. C. J. Tung, R. L. Shyu, and C. M. Kwei, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/21/7/012 21, 1125 (1988).
60. D. E. Meltzer, J. R. Sabin, and S. B. Trickey, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.41.220 41, 220 (1990).
61. Y. F. Chen, C. M. Kwei, and C. J. Tung, J. Phys. B JPAPEH 0953-4075 10.1088/0953-4075/26/6/008 26, 1071 (1993).
62. J. Wang, R. J. Mathar, S. B. Trickey, and J. R. Sabin, J. Phys.: Condens. Matter JCOMEL 0953-8984 10.1088/0953-8984/11/20/304 11, 3973 (1999).
63. I. Gertner, M. Meron, and B. Rosner, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.21.1191 21, 1191 (1980).
64. J. D. Fuhr, V. H. Ponce, F. J. García de Abajo, and P. M. Echenique, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.57.9329 57, 9329 (1998).
65. C. F. Bunge, J. A. Barrientos, and A. V. Bunge, At. Data Nucl. Data Tables ADNDAT 0092-640X 10.1006/adnd.1993.1003 53, 113 (1993).
66. U. Kadhane, C. C. Montanari, and L. C. Tribedi, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.67.032703 67, 032703 (2003).
67. U. Kadhane, C. C. Montanari, and L. C. Tribedi, J. Phys. B JPAPEH 0953-4075 10.1088/0953-4075/36/14/307 36, 3043 (2003).
68. V. H. Ponce, At. Data Nucl. Data Tables ADNDAT 0092-640X 19, 63 (1977).
69. D. Isaacson, Compilation of rs Values, New York University, Doc. No. 02698 (National Auxiliary Publication Service, New York, 1975).
70. C. C. Montanari and J. E. Miraglia, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.73.024901 73, 024901 (2006).
71. M. S. Gravielle and J. E. Miraglia, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.50.2425 50, 2425 (1994).
72. J. P. Thomas and M. Fallavier, Nucl. Instrum. Methods NUIMAL 0029-554X 149, 169 (1978).
73. G. Schiwietz and P. L. Grande, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 175-177, 125 (2001).
74. P. L. Grande and G. Schiwietz, CASP, convolution approximation for swift particles, version 3.1, 2004. Code available at http://www.hmi.de/people/ schiwietz/casp.html
75. A. F. Lifschitz and N. R. Arista, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.69.012902 69, 012902 (2004).
76. H. H. Andersen, F. Besenbacher, and P. Goddiksen, Nucl. Instrum. Methods NUIMAL 0029-554X 10.1016/0029-554X(80)91234-3 168, 75 (1980).
77. D. L. da Silva, G. de Azevedo, M. Behar, J. F. Dias, and P. L. Grande, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 175-177, 98 (2001).
78. G. E. Hoffman and D. Powers, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.13.2042 13, 2042 (1976).
79. Y. Kido and T. Hioki, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.27. 2667 27, 2667 (1983).
80. E. Friedland and J. M. Lombard, Nucl. Instrum. Methods NUIMAL 0029-554X 168, 25 (1980).
81. A. Nomura, F. Matsubara, and S. Kiyono, Jpn. J. Appl. Phys. JJAPA5 0021-4922 15, 2495 (1976).
82. E. Friedland and C. P. Kotze, Nucl. Instrum. Methods Phys. Res. NIMRD9 0167-5087 191, 490 (1981).