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Volumn 185, Issue 1-3, 2007, Pages 31-37
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Development of a novel binderless diamond grinding wheel for machining IC chips for failure analysis
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Author keywords
Binderless diamond grinding wheel; IC chips; Infra red optics; Optical glass; Silicon die and chip packaging grinding
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Indexed keywords
CHIP SCALE PACKAGES;
DIAMOND CUTTING TOOLS;
INTEGRATED CIRCUIT MANUFACTURE;
MICROPROCESSOR CHIPS;
PRODUCT DEVELOPMENT;
TRANSISTORS;
BINDERLESS DIAMOND GRINDING WHEEL;
CHIP PACKAGING GRINDING;
INFRARED OPTICS;
SILICON DIE PACKAGING GRINDING;
GRINDING WHEELS;
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EID: 33847136303
PISSN: 09240136
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jmatprotec.2006.03.139 Document Type: Article |
Times cited : (11)
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References (14)
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