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Volumn 185, Issue 1-3, 2007, Pages 31-37

Development of a novel binderless diamond grinding wheel for machining IC chips for failure analysis

Author keywords

Binderless diamond grinding wheel; IC chips; Infra red optics; Optical glass; Silicon die and chip packaging grinding

Indexed keywords

CHIP SCALE PACKAGES; DIAMOND CUTTING TOOLS; INTEGRATED CIRCUIT MANUFACTURE; MICROPROCESSOR CHIPS; PRODUCT DEVELOPMENT; TRANSISTORS;

EID: 33847136303     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2006.03.139     Document Type: Article
Times cited : (11)

References (14)
  • 1
    • 2942620474 scopus 로고    scopus 로고
    • V.C., Venkatesh, Precision manufacture of spherical and aspherical surfaces on plastics, glass, silicon and germanium, CURRENT SCIENCE, Indian Academy Sci., Bangalore, India, 84, 9 (2003), 1211-1219.
  • 2
    • 0029236915 scopus 로고
    • Semi-ductile grinding and polishing of ophthalmic aspherics and spherics
    • Zhong Z., and Venkatesh V.C. Semi-ductile grinding and polishing of ophthalmic aspherics and spherics. Ann. CIRP. 44 1 (1995) 339-342
    • (1995) Ann. CIRP. , vol.44 , Issue.1 , pp. 339-342
    • Zhong, Z.1    Venkatesh, V.C.2
  • 4
    • 33847146022 scopus 로고    scopus 로고
    • M. Konneh, An experimental investigation on partial ductile mode grinding of silicon, Ph.D. thesis, Universiti Teknologi Malaysia (2003).
  • 5
    • 33847171186 scopus 로고    scopus 로고
    • S. Izman, Investigation into some aspects of partial ductile mode in wet and dry grinding of optical glass, Ph.D. thesis, Universiti Teknologi Malaysia (2004).
  • 6
    • 33847127619 scopus 로고    scopus 로고
    • V.C. Venkatesh, S. Izman, Application for Malaysian Patent for invention of novel diamond wheel filed on 30th January 2003. No. PI 20030326.
  • 7
    • 33847162532 scopus 로고    scopus 로고
    • K.K. Khoo, Bottom-up milling of package substrate for planar delayering, B. Eng. thesis, Universiti Teknologi Malaysia (2002).
  • 8
    • 33847142938 scopus 로고    scopus 로고
    • L.S. Lai, Top-down milling of package substrate for planar delayering, B. Eng. thesis, Universiti Teknologi Malaysia (2002).
  • 9
    • 33847165112 scopus 로고    scopus 로고
    • K.S. Woon, Binderless grinding wheel for failure analysis of silicon die on IC chips, B. Eng. thesis, Universiti Teknologi Malaysia (2003).
  • 10
    • 33847101141 scopus 로고    scopus 로고
    • K.F. Tang, Novel grinding process for failure analysis of IC chip packaging, B. Eng. thesis, Universiti Teknologi Malaysia (2003).
  • 11
    • 33847145140 scopus 로고    scopus 로고
    • T.T. Mon, Chemical mechanical polishing of optical glass subjected to partial ductile grinding, M. Eng. thesis, Universiti Teknologi Malaysia (2003).
  • 12
    • 33847095674 scopus 로고    scopus 로고
    • K.F. Phoon, Design and development of a desk top grinding machine for IC chips, B. Eng. thesis, Universiti Teknologi Malaysia (2003).
  • 13
    • 0031644050 scopus 로고    scopus 로고
    • Diamond cutting of silicon with nanometric finish
    • Fang F.Z., and Venkatesh V.C. Diamond cutting of silicon with nanometric finish. Ann. CIRP 47 1 (1998) 45-49
    • (1998) Ann. CIRP , vol.47 , Issue.1 , pp. 45-49
    • Fang, F.Z.1    Venkatesh, V.C.2
  • 14
    • 33847169190 scopus 로고    scopus 로고
    • V.C. Venkatesh, S. Izman, S. Shariff, T.T. Mon, M. Konneh, Precision grinding of hard and brittle materials, Pertanika Journal of Science and Technology, Universiti Putra Malaysia, Kuala Lumpur, in press.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.