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Volumn 25, Issue 1, 2007, Pages 37-57

Carbon dioxide snow cleaning

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; SIZE DETERMINATION; SNOW; SOLVENTS; SURFACE CHEMISTRY; THERMODYNAMICS;

EID: 33847073082     PISSN: 02726351     EISSN: 15480046     Source Type: Journal    
DOI: 10.1080/02726350601146424     Document Type: Article
Times cited : (77)

References (45)
  • 1
    • 33847033866 scopus 로고    scopus 로고
    • Anderson, S. 2001. Personal communication. Lawrence Livermore National Laboratory.
    • Anderson, S. 2001. Personal communication. Lawrence Livermore National Laboratory.
  • 2
    • 33847014661 scopus 로고    scopus 로고
    • Substrate cleaning method and apparatus
    • U.S. Patent 6,036,581
    • Aoki, H. 2000. Substrate cleaning method and apparatus. U.S. Patent 6,036,581.
    • (2000)
    • Aoki, H.1
  • 3
    • 33847039717 scopus 로고    scopus 로고
    • ATEP Technology Company
    • ATEP Technology Company. 2004. See website: http://www.ateptech.com
    • (2004) See website
  • 4
    • 33847031875 scopus 로고    scopus 로고
    • CRT electron gun cleaning using carbon dioxide snow
    • U.S. Patent 5,605,484
    • Bailey, R. A. & J. C. Midavaine. 1997. CRT electron gun cleaning using carbon dioxide snow. U.S. Patent 5,605,484.
    • (1997)
    • Bailey, R.A.1    Midavaine, J.C.2
  • 5
    • 33847054496 scopus 로고    scopus 로고
    • Solid/gas carbon dioxide spray cleaning system
    • U.S. Patent 5,853,128
    • Bowen, H. S., R. M. Lee, & J. H. Bowen, 1998. Solid/gas carbon dioxide spray cleaning system. U.S. Patent 5,853,128.
    • (1998)
    • Bowen, H.S.1    Lee, R.M.2    Bowen, J.H.3
  • 6
    • 33847030480 scopus 로고    scopus 로고
    • Wafer cassette cleaning using carbon dioxide jet spray
    • U.S. Patent 5,766,061
    • Bowers, C. W. 1998. Wafer cassette cleaning using carbon dioxide jet spray. U.S. Patent 5,766,061.
    • (1998)
    • Bowers, C.W.1
  • 7
    • 33847050376 scopus 로고    scopus 로고
    • Use of electrostatic bias to clean non-electrostatically sensitive components with a carbon dioxide spray
    • U.S. Patent 6,146,466
    • Bowers, C. W. 2000. Use of electrostatic bias to clean non-electrostatically sensitive components with a carbon dioxide spray. U.S. Patent 6,146,466.
    • (2000)
    • Bowers, C.W.1
  • 8
    • 33847030881 scopus 로고    scopus 로고
    • Carbon dioxide jet spray polishing of metal surfaces
    • U.S. Patent 5,765,578
    • Brandt, E. S. & B. A. Simpson. 1998. Carbon dioxide jet spray polishing of metal surfaces. U.S. Patent 5,765,578.
    • (1998)
    • Brandt, E.S.1    Simpson, B.A.2
  • 9
    • 33847084475 scopus 로고    scopus 로고
    • Chao, S. C., T. B. Stanford, Jr., E. J. Palen, & C. Lee. 1996. Supercritical fluid cleaning apparatus without pressure vessel. U.S. Patent 5,482,211.
    • Chao, S. C., T. B. Stanford, Jr., E. J. Palen, & C. Lee. 1996. Supercritical fluid cleaning apparatus without pressure vessel. U.S. Patent 5,482,211.
  • 10
    • 33847066045 scopus 로고    scopus 로고
    • Personal communication. Alliance Technologies
    • DePalma, P. W. 1997. Personal communication. Alliance Technologies.
    • (1997)
    • DePalma, P.W.1
  • 11
    • 33847071781 scopus 로고    scopus 로고
    • System and method for controlling humidity in a cryogenic aerosol spray cleaning system
    • U.S. Patent 6,572,457
    • DePalma, P. W. & R. Sherman. 2003. System and method for controlling humidity in a cryogenic aerosol spray cleaning system. U.S. Patent 6,572,457.
    • (2003)
    • DePalma, P.W.1    Sherman, R.2
  • 12
    • 33847075585 scopus 로고    scopus 로고
    • Personal communication
    • Drexler, D. & J. Yurko. 2001. Personal communication.
    • (2001)
    • Drexler, D.1    Yurko, J.2
  • 14
    • 33847046116 scopus 로고    scopus 로고
    • 2 cleaning system. U.S. Patent 5,390,450 (1995); U.S. Patent 5,405,283 (1995); U.S. Patent 5,514,024 (1996); U.S. Patent 5,944,581 (1999).
    • 2 cleaning system. U.S. Patent 5,390,450 (1995); U.S. Patent 5,405,283 (1995); U.S. Patent 5,514,024 (1996); U.S. Patent 5,944,581 (1999).
  • 15
    • 33847009603 scopus 로고
    • February, p
    • Hill, E. 1994. Prec. Clean., February, p. 36.
    • (1994) Prec. Clean , pp. 36
    • Hill, E.1
  • 16
    • 0028992480 scopus 로고
    • Carbon dioxide jet spray cleaning of molecular contaminants
    • Hills, M. M. 1995a. Carbon dioxide jet spray cleaning of molecular contaminants. J. Vac. Sci. Technol. A13: 30-34.
    • (1995) J. Vac. Sci. Technol , vol.A13 , pp. 30-34
    • Hills, M.M.1
  • 18
    • 3643148199 scopus 로고
    • Cleaning surfaces with dry ice
    • August, p
    • Hoenig, S. A. 1986. Cleaning surfaces with dry ice. Compress. Gas Mag. August, p. 22-25.
    • (1986) Compress. Gas Mag , pp. 22-25
    • Hoenig, S.A.1
  • 19
    • 33847076368 scopus 로고
    • Personal communication. Kearfott Inc
    • Hubner, E. 1994. Personal communication. Kearfott Inc.
    • (1994)
    • Hubner, E.1
  • 20
    • 33847078163 scopus 로고    scopus 로고
    • Dense fluid spray cleaning method and apparatus
    • U.S. Patent 5,725,154
    • Jackson, D. P. 1998. Dense fluid spray cleaning method and apparatus. U.S. Patent 5,725,154.
    • (1998)
    • Jackson, D.P.1
  • 21
    • 33847011504 scopus 로고    scopus 로고
    • Jacobs, K. 1997. Personal communication. See also discussion of AFM data in the quartz section at website for Applied Surface Technologies: http://www.co2clean.com/afm.htm
    • Jacobs, K. 1997. Personal communication. See also discussion of AFM data in the quartz section at website for Applied Surface Technologies: http://www.co2clean.com/afm.htm
  • 22
    • 33847029287 scopus 로고    scopus 로고
    • Method and apparatus for removing contaminants and coatings from a substrate using pulsed radiant energy and liquid carbon dioxide
    • U.S. Patent 5,613,509
    • Kolb, A. C., L. W. Braverman, C. J. Silberman, R. R. Hamm, & C. M. Cates. 1997. Method and apparatus for removing contaminants and coatings from a substrate using pulsed radiant energy and liquid carbon dioxide. U.S. Patent 5,613,509.
    • (1997)
    • Kolb, A.C.1    Braverman, L.W.2    Silberman, C.J.3    Hamm, R.R.4    Cates, C.M.5
  • 23
    • 33847041203 scopus 로고    scopus 로고
    • 2 jet spray nozzles with multiple orifices. U.S. Patent 6,173,916
    • 2 jet spray nozzles with multiple orifices. U.S. Patent 6,173,916.
  • 24
    • 33847047569 scopus 로고
    • Environment control apparatus
    • U.S. Patent 5,316,560
    • Krone-Schmidt, W. & J. R. Markle. 1994. Environment control apparatus. U.S. Patent 5,316,560.
    • (1994)
    • Krone-Schmidt, W.1    Markle, J.R.2
  • 25
    • 33847039715 scopus 로고
    • Electrostatic discharge control during jet spray
    • U.S. Patent 5,409,418
    • Krone-Schmidt, W., E. S. Di Milia, &M. J. Slattery. 1995. Electrostatic discharge control during jet spray. U.S. Patent 5,409,418.
    • (1995)
    • Krone-Schmidt, W.1    Di Milia, E.S.2    Slattery, M.J.3
  • 26
    • 33847041988 scopus 로고
    • Apparatus for removing small particles from a substrate
    • U.S. Patent 4,962,891
    • Layden, L. M. 1990a. Apparatus for removing small particles from a substrate. U.S. Patent 4,962,891.
    • (1990)
    • Layden, L.M.1
  • 27
    • 33847061412 scopus 로고
    • Personal communication
    • Layden, L. M. 1990b. Personal communication.
    • (1990)
    • Layden, L.M.1
  • 28
    • 0010359394 scopus 로고
    • High velocity carbon dioxide snow for cleaning vacuum system surfaces
    • Layden, L. & D. Wadlow. 1990. High velocity carbon dioxide snow for cleaning vacuum system surfaces. J. Vac. Sci. Technol. A8: 3881-3883.
    • (1990) J. Vac. Sci. Technol , vol.A8 , pp. 3881-3883
    • Layden, L.1    Wadlow, D.2
  • 29
    • 33847052976 scopus 로고    scopus 로고
    • Gas analyzer with arrangement for spray-cleaning optical element
    • U.S. Patent 5,720,650
    • Mauze, G. R., G. W. Hopkins II, & T. D. Simons. 1997. Gas analyzer with arrangement for spray-cleaning optical element. U.S. Patent 5,720,650.
    • (1997)
    • Mauze, G.R.1    Hopkins II, G.W.2    Simons, T.D.3
  • 30
    • 33847065203 scopus 로고
    • Personal communication. General Electric, New York
    • Morris, W. 1992. Personal communication. General Electric, New York.
    • (1992)
    • Morris, W.1
  • 31
  • 32
    • 33847039716 scopus 로고    scopus 로고
    • Sherman, R. 1997b. See discussion of AFM data on gold samples at website for Applied Surface Technologies: http://www.co2clean.com/afm.htm.
    • Sherman, R. 1997b. See discussion of AFM data on gold samples at website for Applied Surface Technologies: http://www.co2clean.com/afm.htm.
  • 33
    • 34548168729 scopus 로고
    • Flemington, N.J, Witter Publishing. p
    • Sherman, R. & P. Adams. 1995. In Proceedings/CleanTech. Flemington, N.J.: Witter Publishing. p. 271.
    • (1995) Proceedings/CleanTech , pp. 271
    • Sherman, R.1    Adams, P.2
  • 35
    • 33847036816 scopus 로고
    • See discussion of AFM data at website for Applied Surface Technologies
    • Sherman, R. & R. Eby. 1995. See discussion of AFM data at website for Applied Surface Technologies: http://www.co2clean.com/afm.htm.
    • (1995)
    • Sherman, R.1    Eby, R.2
  • 36
    • 0000290382 scopus 로고
    • The removal of hydrocarbons and silicone grease stains from silicon wafers
    • Sherman, R. & W. Whitlock. 1990. The removal of hydrocarbons and silicone grease stains from silicon wafers. J. Vac. Sci. Technol. B8, 56-567.
    • (1990) J. Vac. Sci. Technol , vol.B8 , pp. 56-567
    • Sherman, R.1    Whitlock, W.2
  • 38
    • 84957350837 scopus 로고
    • Surface cleaning with the carbon dioxide snow jet
    • Sherman, R., D. Hirt, & R. Vane. 1994. Surface cleaning with the carbon dioxide snow jet. J. Vac. Sci. Technol. A12: 1876-1881.
    • (1994) J. Vac. Sci. Technol , vol.A12 , pp. 1876-1881
    • Sherman, R.1    Hirt, D.2    Vane, R.3
  • 39
    • 33847043268 scopus 로고    scopus 로고
    • 2002. Personal communication. Va-Tran Systems
    • Sloan, J. 2002. Personal communication. Va-Tran Systems.
    • Sloan, J.1
  • 40
    • 33847071780 scopus 로고
    • Method for cleaning surface by heating and a stream of snow
    • U.S. Patent 5,354,384
    • Sneed, J. D., W. Krone-Schmidt, M. J. Slattery, & H. S. Bowen. 1994. Method for cleaning surface by heating and a stream of snow. U.S. Patent 5,354,384.
    • (1994)
    • Sneed, J.D.1    Krone-Schmidt, W.2    Slattery, M.J.3    Bowen, H.S.4
  • 41
    • 33847014660 scopus 로고
    • Carbon dioxide snow agglomeration and acceleration
    • U.S. Patent 5,125,979
    • Swain, E. A., S. R. Carter, & S. A. Hoenig. 1992. Carbon dioxide snow agglomeration and acceleration. U.S. Patent 5,125,979.
    • (1992)
    • Swain, E.A.1    Carter, S.R.2    Hoenig, S.A.3
  • 42
    • 33847032277 scopus 로고    scopus 로고
    • van der Donck, J. C. J., R. Schmits, R. E. van Vliet, & A. G. T. M. Bastein. 2006. Removal of sub-100 nm particles from structured substrates. Paper presented at the 2004 MST conference.
    • van der Donck, J. C. J., R. Schmits, R. E. van Vliet, & A. G. T. M. Bastein. 2006. Removal of sub-100 nm particles from structured substrates. Paper presented at the 2004 MST conference.
  • 44
    • 33847075961 scopus 로고
    • Apparatus and method for removing minute particles from a substrate
    • U.S. Patent 4,806,171
    • Whitlock, W. H., W. R. Weltmer, & J. D. Clark. 1989. Apparatus and method for removing minute particles from a substrate. U.S. Patent 4,806,171.
    • (1989)
    • Whitlock, W.H.1    Weltmer, W.R.2    Clark, J.D.3
  • 45
    • 33847060160 scopus 로고    scopus 로고
    • High dispersion carbon dioxide snow apparatus
    • U.S. Patent 5,775,127
    • Zito, R. 1998. High dispersion carbon dioxide snow apparatus. U.S. Patent 5,775,127.
    • (1998)
    • Zito, R.1


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