Deposition and characterization of (Ti,Zr)N thin films grown through PAPVD by the pulsed arc technique

AIP Conference Proceedings

Volumn 875, Issue , 2006, Pages 232-235

  Marulanda, D M ^a   Trujillo, O ^a   Devia, A ^a  

^a UNIVERSIDAD NACIONAL DE COLOMBIA   (Colombia)

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EID: 33847027693     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2405938     Document Type: Article

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