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Volumn 3, Issue 8, 2006, Pages 63-67
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Analysis of the hump characteristics in poly-Si thin film transistor
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
DRY ETCHING;
GATES (TRANSISTOR);
POLYSILICON;
PRODUCT DESIGN;
CHANNEL EDGE;
EDGE STEP ACTIVE (ESA);
FRINGING FIELD;
HUMP CHARACTERISTICS;
THIN FILM TRANSISTORS;
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EID: 33846977765
PISSN: 19385862
EISSN: 19386737
Source Type: Conference Proceeding
DOI: 10.1149/1.2356335 Document Type: Conference Paper |
Times cited : (7)
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References (3)
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