Study of the effect of substrate bias on the electrical properties of sputtered HfO2 thin film deposited on silicon substrate

Microelectronics International

Volumn 24, Issue 1, 2007, Pages 46-48

  Nahar, R K ^a   Sharma, Aparna ^a  

^a CENTRAL ELECTRONICS ENGINEERING RESEARCH INSTITUTE   (India)

Author keywords

Electrical conductivity; Substrates; Thin films

Indexed keywords

EID: 33846949435     PISSN: 13565362     EISSN: None     Source Type: Journal    
DOI: 10.1108/13565360710725946     Document Type: Article

References (12)