Real-time observation of initial thermal oxidation on Si(110)-16×2 surface by photoemission spectroscopy

ECS Transactions

Volumn 3, Issue 2, 2006, Pages 311-316

  Suemitsu, M ^a   Kato, A ^a   Togashi, H ^a   Konno, A ^a   Yamamoto, Y ^a   Teraoka, Y ^b   Yoshigoe, A ^b   Enta, Y ^c   Narita, Y ^d  

^a TOHOKU UNIVERSITY   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

^c HIROSAKI UNIVERSITY   (Japan)

^d KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

OXIDATION; PHOTOELECTRON SPECTROSCOPY; REAL TIME SYSTEMS; SILICON;

ADATOM CLUSTERS; INITIAL THERMAL OXIDATION; PHOTOEMISSION SPECTROSCOPY;

SURFACE REACTIONS;

EID: 33846944374     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2356291     Document Type: Conference Paper

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