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Physical Review B - Condensed Matter and Materials Physics

Volumn 75, Issue 7, 2007, Pages

Damage evolution in low-energy ion implanted silicon

(9) Karmouch, R a Anahory, Y a Mercure, J F a Bouilly, D a Chicoine, M a Bentoumi, G a Leonelli, R a Wang, Y Q a Schiettekatte, F a

a UNIVERSITÉ DE MONTRÉAL (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33846821501 PISSN: 10980121 EISSN: 1550235X Source Type: Journal
DOI: 10.1103/PhysRevB.75.075304 Document Type: Article

Times cited : (18)

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