Scheduling cluster tools using filtered beam search and recipe comparison

Proceedings - Winter Simulation Conference

Volumn 2005, Issue , 2005, Pages 2203-2210

  Oechsner, Simon ^a   Rose, Oliver ^b  

^a UNIVERSITY OF WÜRZBURG   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ONLINE SEARCHING; PROCESS CONTROL; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; WSI CIRCUITS;

SCHEDULING CLUSTER TOOLS; WAFERS;

PROGRAM PROCESSORS;

EID: 33846694891     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2005.1574507     Document Type: Conference Paper

References (6)

1. Bohr, M. 1999. Schedulingverfahren für Cluster Tools in der Halbleiterfertigung. (In German) Master's thesis. Department of Computer Science. University of Würzburg, Germany.
2. Dümmler, M. 2004. Modeling and Optimization of Cluster Tools in Semiconductor Manufacturing. PhD thesis, Department of Computer Science. University of Würzburg, Germany.
3. th European Simulation Symposium, Delft, Netherlands.
4. Oechsner, S. and Rose, O. 2005. A filtered beam search approach to scheduling cluster tools in semiconductor manufacturing. In Proceedings of IERC'05, May 14-18, Atlanta, USA
5. Pinedo, M. 2001. Scheduling. Theory, Algorithms, and Systems. 2nd edition. Prentice-Hall.
6. Schmidt, M. 1999. Modellierung und Simulation von Cluster Tools in der Halbleiterfertigung. (In German) Master's thesis. Department of Computer Science. University of Würzburg, Germany.