Study on the mechanism and measurement of stress of TiO2 and SiO2 thin-films

Wuli Xuebao/Acta Physica Sinica

Volumn 55, Issue 12, 2006, Pages 6459-6463

  Gu, Pei Fu ^a   Zheng, Zhen Rong ^a   Zhao, Yong Jiang ^a   Liu, Xu ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Ion assisted deposition; Packing density; Thin film stress

Indexed keywords

EID: 33846536904     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)